RL mm A-STACK FAB. P mm COAT5 3DEV5 FAB. RL mm C-STACK FAB. 150mm EBR1&2 FAB
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1 Lot # Qty Manufact urer Model Description Serial # Wafer Size Vintage Internal ID Location 1 Tylan Tystar Tylan Tystar Horizontal Furnace Tube 1 - Drive - Atmospheric Tube 2 - Gate Oxide - Atmospheric Tube 3 - Initial Oxide - Atmospheric Tube 4 - Gate / Initial Oxide - Atmospheric RL mm A-STACK FAB 1 Canon CDS630 Coat and Develop tool - 2 tracks in one frame 1 Tylan Tystar Tylan Tystar Horizontal Furnace Tube 1 - Drive / Field Oxide - Atmospheric Tube 2 - Drive / Field Oxide - Atmospheric Tube 3 - Field Oxide - Atmospheric Tube 4 - Low Temp Oxide (LTO)- Phos doping available P mm COAT5 3DEV5 FAB RL mm C-STACK FAB 1 AMAT P Chamber CVD Deposition mm tbc 3CVD2 FAB Chamber A - PE Teos or Ozone Teos Chamber B - Nitride Chamber C - PSG 1 DNS SD-W60A-AVPE Resist Developer Tracks mm DEV1 FAB 1 DNS EEW622B Edge Bead Removal - Two tracks in one frame (3EBR1), (3EBR2) 150mm EBR1&2 FAB 1 AMAT 8330 Hexode Metal Etcher mm ETM2 FAB 1 AMAT 8330 Hexode Metal Etcher mm tbc 3ETM3 FAB 1 Aviza Omega 201 Perie Nitride Etcher Clamped mm ETN1 FAB 1 Aviza Omega 201 RIE Etcher Clamped mm ETQ3 FAB 1 AMAT 8310 Oxide Etcher mm tbc 3ETX2 FAB 1 Canon FPA1550 Mk3 Stepper M3 150mm tbc 3FPA4 FAB 1 Canon FPA1550 Mk4 Stepper M4 150mm tbc 3FPA5 FAB 1 Vindon Oven mm OVN4 FAB Scientific 1 Blue M DCC-206CY Oven DCC mm OVN6 FAB 1 Vindon Oven mm OVN7 FAB Scientific 1 DNS DNS636 PIQ Tracks mm PIQ1 FAB 1 Convac Falcon PIQ Coater VS mm PIQ2 FAB 1 Faith mm tbc 3RAPA FAB Rapitran 1 Faith unknown 150mm tbc 3RAPC FAB Rapitran 1 KLA 5015 Registration tool for qualifying steppers checking alignment and CD's mm tbc 3REM2 FAB 1 Semitool WSST608A Spray Solvent Tool mm tbc 3RSO4 FAB
2 1 Semitool 270D Single Stack Spin Rinse Drier unknown 150mm tbc 3RSW2 FAB 1 Semitool 870S/L Dual Stack Spin Rinse Drier C mm tbc 3RSW3&6 FAB 1 FSI Saturn Spray Acid Processor mm SATB FAB 1 FSI Saturn Spray Acid Processor mm SATC FAB 1 DNS DNS622 SOG Coat Tool mm SOG2&3 FAB 1 KLA 6100 Surfscan plain wafer defect mm tbc 3SS3 FAB 1 Semitool 1500 Nitride Deposition mm VTP2 FAB 1 Semitool 1500 Poly Deposition mm VTP3 FAB 1 Edwards Manual Wetbench Pre-Metal Clean 991/ mm WET1 FAB 1 x HF Bath 1 x Unknown 1 x Acid Bath 2 x Dump Rinse 1 x Glove Wash 1 Edwards Manual Wetbench 2 x Aluminium Etch unknown 150mm tbc 3WET2 FAB 1 x Dump Rinse 1 x Glove Wash 1 Edwards Manual Wetbench 2 x HF Bath 901/ mm WET3 FAB 2 x Dump Rinse 1 x Glove Rinse 1 Edwards Manual Wetbench 1 x Ortho Bath 901/ mm WET4 FAB 1 x DI Bath 1 x HF Bath 1 x Dump Rinse 1 x Glove Wash 1 Edwards Manual Wetbench 2 x HF Bath 2 x Dump Rinse 1 x Glove Rinse 901/ mm WET5 FAB Manufact Internal Lot # Qty urer Model Description Serial # Wafer Size Vintage ID Location 1 Edwards QDP 80 Pump 1 Edwards 1500R Gas Reactor Column (GRC) 15130C 1 Edwards QDP 80 Pump 1 Edwards 1500R Gas Reactor Column (GRC) GSM 5 (Controller) early 90s GAS CAB Dual process outlet and purge 43 Manual gas cabinet early 90s GAS CAB Dual process line and purge 44 GSM 5 early 90s GAS CAB Dual process outlet and purge 42 GSM 5 GAS CAB 58 GSM 5 GAS CAB 59 GSM 5 GAS CAB 60
3 1 Air Products Gasguard 250 GAS CAB 66 DX (Controller) CAB 1 Dual process outlet and purge DX CAB 2 Dual process outlet and purge DX Enclosure DX DX Manual GAS CAB Single process cylinder outlet 51 DX Manual GAS CAB Dual process outlet and purge 30 GSM 5 GSM 5 GAS CAB 55 GSM 5 GAS CAB 54 Manual Dual process outlet and purge 1 Edwards iqdp 80 Pump 1 Edwards iqdp 80 Pump 1 Edwards iqdp 80 Pump 1 Edwards iqdp 80 Pump 1 Edwards TPU 4214 Abatement system Edwards iqdp 80 Pump 1 Edwards iqdp 80 Pump 1 Edwards B2M80 pump stack 1 Edwards Drystar Pump 1 Edwards Drystar Pump 1 Plasma Products Gas Reactor Column (GRC) 1 Edwards 1502 Gas Reactor Column (GRC) Edwards iqdp 80 Pump 1 Edwards M150 Gas Reactor Column (GRC) 1 Edwards QDP 80 Pump GSM 5 GAS CAB 48 GSM 5 cabinet enclosure GSM 5
4 Triple manual Gas cabinet Manual Dual process with auto changeover Manual Dual process outlet Triple process outlet DX DX Dual process oulet and purge 1 Edwards QDP80 Pump 1 Edwards QDP80 Pump DX cabinet 1 Plasma Gas Reactor Column (GRC) Products 1 Edwards QDP80 Pump 1 Edwards M150 Gas Reactor Column (GRC) 1 Air Gasguard 250 Products 1 BOC FME Bulk dispense cabinet 1 Air Products Manual Dual process outlet manual cabinet 1 Edwards Drystar Pump 1 Edwards QDP80 Pump 1 Edwards QDP80 Pump 1 Edwards Drystar Pump 1 Edwards 1502 Gas Reactor Column (GRC) 1 Air Products manual gas cabinet Triple process outlet Manufact Lot # Qty urer Model Description Serial # Wafer Size Vintage Photo IDs Internal ID 1 Staubli Unimation RX90 CR (Arm) CS7 RX90 (controller) Robot Arm and controller KLA 1007 Prober KLA 5011/5015 Coherence Probe Metrology System Canon CDS630 Track
5 1 Rudolph Research 1 SensArray Corporati on AutoEL Automatic Ellipsometer P/N: 1501A Thermocouple Instrumented Wafer Lot # Qty 1 Semitool ST-270D Spin rinse dryer Cassette: A182-60MB-64A02 RH hinge 1 Semitool ST-270D Spin rinse dryer Cassette: A182-60MB-64A02 LH hinge KLA 2608 Inspection Station Cybeq 8000 Robot Robot 620R Applied Materials 1 Applied Materials P5000 8inch Oxide Etch Chamber P5000 8inch Oxide Etch Chamber Fortrend Rapitran E8225R Wafer Transfer System Tylan/Milli pore Unit MKS Tylan/Milipore: 2900 series 4 x FC-260 Unit: UFC x UFC-1100A MKS: 1159B Assorted MFCs Nanospec 9100 Measurement Tool Asyst Interface Module Manufact urer Model Description Serial # Wafer Size Vintage Photo IDs Internal ID 1 Europac 2000 system Compacter RSW7
6 1 Applied Materials Hexodes 1 Bell Jar Xinix 1015 Endpoint Controller Applied 8300 Metal Etcher Materials Unknown Track Lot # Qty Lot # Qty Manufact urer Model Description Serial # Wafer Size Vintage Photo IDs Internal ID 1 G and C Machines Alpak Induction Motor 11kW 2900 RPM Size: D160M n/a G and C Machines 1 GEC Electromo tors Alpak Induction Motor 11kW 2900 RPM Size: D160M Cipak CENTURION Motor 22kW 415V 1450rpm Size: D180L 1 BERL DM160 MX2 3-Phase Induction Motor 15kW 2930rpm 1 VESDA E700 Air Sampling Smoke Detection System with 1 control unit n/a Manufact urer Model Description Serial # Wafer Size Vintage 1 Edwards Drystar QDP 80 pump Q Mark II controller QMB500 Blower 1 Edwards Drystar QDP 80 pump Q Mark II controller No Blower 1 Edwards - Pump Graham already has more details Internal ID Location Loading Bay Loading Bay Loading Bay
7 Lot # Qty 1 Edwards - Pump Graham already has more details Manufact urer Model Description Serial # Wafer Size Vintage Internal ID Loading Bay Location
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