METROLOGY AND POSITIONING

Transcription

1 1 METROLOGY AND POSITIONING

2 Presentation of SYMETRIE Headquarter: Nimes France Award of French Metrology in 2007 Specialized in hexapods for optics, space, research, synchrotrons and defence Some customers: AMOS, Airbus Defence & Space, Bertin Technologies, CEA, CNRS, IAS, IRAM, LAM, Thales Alenia Space 2

3 Our equipments Our equipments Equipment Engineering department Mechanical assembly Test facilities - CAD software Solidworks - Finite element analysis - Development software Labview (NI) - Hexapod configuration software - Product assembly - Prototype machine shop - Clean room class (ISO 7) - Metrology lab - 3D CMM (coordinate measuring machine) - Laser interferometers - Laser trackers - Electronic levels - Capacitive sensors - Vacuum chamber 3

4 Hexapod technology Serial structure 6 Degrees of Freedom High payload No cumulative errors High accuracy and resolution Good weight / stiffness ratio Configurable pivot point in software Hexapod: Parallel Structure 4

5 JWST MIRIM Optical bench_cea JWST Space Telescope (NASA-ESA- CSA) is the successor to Hubble. Optical qualification bench for high resolution MIRIM sensor including two precision positioning hexapods (one for the cryostat, one for the optical source). 5

6 Optical instrument qualification_selex ES Qualification of SIMBIO-SYS instrument: 4 cameras that will observe Mercury from 2017 for the ESA BepiColombo Mission. Pivot point: 3 meters away from the hexapod. 6

7 Optical instrument qualification in vacuum _CNRS IAS Qualification of SIMBIO-SYS instrument in vacuum: 4 cameras. Our precision positioning system consists of a hexapod and a goniometer. Resolution, rigidity, vacuum Will be reused on MAJIS instrument (ESA Mission JUICE, launch planned in 2022) 7

8 Mirror adjustment on satellites BORA hexapod align an M3 mirror on GAIA satellite (milky way). Resolution: 0.1 µm - Height: 15 cm High precision hexapod to adjust an M2 mirror in vacuum on an observation satellite. Resolution: 1 µm - Height: 3 m 8

9 Optical instrument qualification in ISO5 clean room_tas Qualification of SSDA instrument for MTG (Meteosat Third Generation) satellites in collaboration with AMOS and BERTIN Technologies High resolution, rigidity, stability Payload: 500 kg Hexapod height: 1 m 9

10 10 Secondary mirrors supports_amos

11 Secondary mirrors supports High stiffness and precision Tip-tilt < 1 arcsec during 10 µm motion in Z Delivered for ground-based telescopes: ARIES (India) OAJ T250 (Spain) PanSTARRS-2 (Hawaii) And soon DAG (Turkey) and LMT/GTM (INAOE Mexico and UMass USA) 11

12 Sub reflector support_iram High precision hexapod to adjust a subreflector on radiotelescope antennas in the mountains. Stiffness, resolution, light weight (carbon platforms), low temperature 4 hexapods are done, other contracts should follow 12

13 13 Sub reflector support_iram

14 Which use for light sources? 6DOF motion systems to position components used in synchrotrons: samples mirrors (including KB) benders vacuum chambers magnets 14

15 Project Laser MegaJoule CEA Symetrie is a supplier to the Laser MegaJoule (LMJ), an experimental inertial confinement fusion device (French equivalent of NIF). 2001: Manual adjustment positioning using a hexapod for a big experimental chamber (17 tons) : Development of a prototype to position the cryogenic target 2007: Chosen by CEA (Atomic Energy Commission) as the precision positioning technology : Symetrie supplied 3 positioning systems for LMJ. 15

16 BORA Hexapod ID01 ESRF This compact hexapod positions a 10 kg payload with high rigidity and stiffness. Resolution: 0.1 µm Height: 145 mm 16

17 BORA Hexapod BM32 ESRF BORA Hexapod BM32 ESRF KB mirrors support Angular resolution: 2 µrad Tested at ESRF: stability over 24 hours = 10 nm in Z! 17

18 BORA Hexapod High Vacuum BORA small hexapods are helping to adjust mirrors in 10-6 mbar vacuum on a satellite during its mounting phase. 18

19 BREVA Hexapod ID03 ESRF (n 1) Forces: 2000 N Angles: ± 20 This hexapod positions a vacuum chamber containing a sample. 19

20 BREVA Hexapod ID03 ESRF (n 2) This hexapod positions a vacuum chamber containing a sample with high resolution (0.5 µm) and ± 20 angular ranges. Payload: 150 kg 20

21 Customized BREVA Hexapod APS 21 High precision sample positioning hexapod for APS (USA). The hexapod is part of a diffractometer. High resolution (0.3 µm) and stiffness Payload: 150 kg

22 JORAN Mirror support hexapod Symetrie developped a new generation of mirror support hexapods in collaboration with ESRF. This hexapod shows outstanding performance in resolution (0.5 µrad) and stability and is now at ESRF, at the Australian Synchrotron and at LBL (cf. infra). 22

23 JORAN qrixs Hexapod LBL High precision hexapod for qrixs experiments at LBL (USA) Heavy load (3.2 tons/7200 lbs) High resolution and low cross-coupling during Rz ±12.5 deg 23

24 KUBAN Hexapod MAX-lab High precision hexapod to position a polarimeter for MAX-lab (Sweden) High resolution and repeatability (1 µm), payload 200 kg 24

25 KUBAN Hexapod BL5 SLAC High precision hexapod to position a mirror system High resolution (0.5 µrad) and repeatability Integration of a roll limit switch under the mobile platform 25

26 Vacuum Hexapod I22 DLS 26 Low vacuum (10-3 mbar) high precision sample manipulator hexapod for Diamond Light Source (UK) High resolution (0.1 µm and ) and high stiffness 250 kg

27 Hexapod + Diffractometer CEA BM32 ESRF Symetrie is supplying CEA ESRF with a high precision hexapod and a high rigidity diffractometer to study nanostructures on surfaces during their growth. Sphere of confusion: 50 µm 27

28 Project Hexapods + Diffractometer SOLEIL Symetrie is supplying SOLEIL with a JORAN hexapod positioning a high vacuum (10-6 mbar) chamber with 4 Huber circles and a BORA hexapod. 28

29 ThomX Hexapod LAL ThomX: a compact light source in which the Compton effect is used to produce hard X-rays (a few tens of kev) Resolution: 1 µm, 2 µrad - Repeatability: 0.8 µm, 0.8 µrad Payload: 1 ton (+ 4 tons granite upper platform) 29

30 FAME Hexapod CNRS at ESRF 30 Customized JORAN Hexapod with integration of an optical table as mobile platform Resolution: high - Repeatability: high Heavy payload

31 Project (not done) Hexapod D2AM ESRF Mobile platform / bender support Decoupling bellows Hutch Beam (height 1400mm) Dismounting tube to handle the pump Positioner N 1 31 Hexapod Positioner N 2 Chamber and pump support (fixed parts)

32 Goniometer MARS beamline SOLEIL High rigidity: the 5-axis goniometer has an orientation range from 0 to 90 (vertical to horizontal) Linear accuracy < 2 µm Sphere of confusion < 20 µm 32

33 New: NanoPos Hexapod Prototype version Real version Resolution: 10 nm 1 µrad Height: 65 mm Integrating piezo stages Sample positioning can be integrated on top of a rotating platform 33

34 34 Our synchrotrons customers

35 Thank you! Symetrie 10 allée Charles Babbage Nimes Cedex 1 France Tel: +33 (0) info@symetrie.fr 35

36 Nos hexapodes de précision Positioning range NanoPos Piezo precision, miniature size BORA High precision, small size BREVA High precision, medium size ZONDA Very stable, very resolute, large travel range SIRIUS Large hexapod high precision SURES Astronomy SONORA Manual hexapod 36

37 Contact us Symétrie 10 allée Charles Babbage Nimes Cedex 1 France Tel: +33 (0) info@symetrie.fr 37