HPF Series. Fiber Units. Wide range of models for various applications and environments COMPATIBLE AMPLIFIERS HPX-AG HPX-ET HPX-T

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1 Fiber Units HPF Series Wide range of models for various applications and environments COMPATIBLE AMPLIFIERS Type Catalog listing Appearance Digital fiber-optic sensors HPX-AG Gang-mounted distributed remote cluster HPX-ET General use AUTO-tuning HPX-T General use, potentiometer tuning High sensitivity Low hysteresis High-speed Mark detection HPX-H HPX-A HPX-F HPX-V Analog output HPX-MA Note: For amplifier details, refer to the section on the relevant amplifier. 1

A VARIETY OF FIBER UNITS Space saving flat and elbow fiber units Even in a small mounting space,

The flat model allows flush mounting in a panel.

(1) Features Bend radius (mm) R Catalog listing HPF-T0 HPF-T0 Cable exits downward.

(1) Free cut R1 HPF-T028 A long-distance lens or side view lens unit can be attached.

(2) R2 HPF-D045LF Coaxial diffuse scan fiber unit and micro-spot lens 1 different combinations

Since the red spot has high visibility, it is easy to position.

HPF-D02 and HPF-D04 have a cable bend radius of only 4mm, reducing hook-up problems.

detection on a substrate Coaxial diffuse scan fiber unit and light axis structure 1mm dia.

25mm dia. (4 receiver cores) (0.25mm dia., 5 dummies) 0.25mm dia. (4 receiver cores) (0.25mm dia., 5 dummies) HPF-D009 HPF-D0 HPF-D02 HPF-D04 0.

2 A VARIETY OF FIBER UNITS Space saving flat and elbow fiber units Even in a small mounting space, flexible wiring is possible with this unbreakable fiber. The flat model allows flush mounting in a panel. HPF-T028 HPF-T028LF HPF-D045LF Selection guide Model Appearance Core: 1mm dia. (1) Features Bend radius (mm) R Catalog listing HPF-T0 HPF-T0 Cable exits downward. Space-saving thru scan Core: 0.5mm dia. (1) Free cut R1 HPF-T028 A long-distance lens or side view lens unit can be attached. R5 HPF-T028LF Core: 1mm dia. (1) Space-saving diffuse scan Core: 1mm dia. (2) R2 HPF-D045LF Coaxial diffuse scan fiber unit and micro-spot lens 1 different combinations Small target objects, marks, etc. can be reliably detected using a micro-spot light (0.1mm dia.). Since the red spot has high visibility, it is easy to position. Typical examples of combinations HPF-D04 + HPF-LU07 HPF-D02 + HPF-LU01 HPF-D02 / HPF-D04 The HPF-D02 and HPF-D04 have a cable bend radius of only 4mm, reducing hook-up problems. R4 Chip front/back discrimination HPF-D0 + HPF-LU02 HPF-D08 + HPF-LU08 HPF-D025 Reject mark detection on a substrate Coaxial diffuse scan fiber unit and light axis structure 1mm dia.(emitter core) 0.5mm dia.(emitter core) 0.5mm dia.(emitter core) 0.25mm dia.(emitter core) 0.25mm dia. (16 receiver cores) 0.25mm dia. (4 receiver cores) (0.25mm dia., 5 dummies) 0.25mm dia. (4 receiver cores) (0.25mm dia., 5 dummies) HPF-D009 HPF-D0 HPF-D02 HPF-D mm dia. (6 receiver cores) 0.5mm dia.(emitter core) 0.5mm dia.(emitter core) 0.5mm dia.(emitter core) HPF-D mm dia. (9 receiver cores) HPF-D mm dia. (9 receiver cores) HPF-D mm dia. (9 receiver cores) Micro-spot lens cannot be attached to the HPF-D009, HPF-D042. For micro-spot lens combinations. 2

Pipe-mounted fiber-optic liquid-level sensors HPF-T02 / HPF-T04 Fail-safe detection uses 2 different sensing methods for detection of upper and lower limits of tank liquid level.

Upper limit detection Light circuit is closed when liquid is absent. Lower limit detection Light circuit is closed when liquid is present.

liquid absent 5m R4 Liquid leak fiber-optic detector HPF-D040 Inherently safe Body and cable are protected by PFA Sensor can be used even in environments like IPA and other organic

Selection guide Model Appearance Features Bend radius (mm) Catalog listing Liquid leak detection 5m R Fiber-optic sensors for tank level detection HPF-D027 / HPF-D0 All-resin structure

3 Pipe-mounted fiber-optic liquid-level sensors HPF-T02 / HPF-T04 Fail-safe detection uses 2 different sensing methods for detection of upper and lower limits of tank liquid level. A 16-axis array of light beams eliminates the effects of air bubbles and water droplets. Adverse effects from air bubbles and water droplets are reduced, resulting in reliable detection. Upper limit detection Light circuit is closed when liquid is absent. Lower limit detection Light circuit is closed when liquid is present. Selection guide Model Appearance Pipe diameters Features Bend radius (mm) Catalog listing Liquid level detection to 1mm 8 to 19mm Receives light when liquid present Receives light when liquid absent 5m R4 Liquid leak fiber-optic detector HPF-D040 Inherently safe Body and cable are protected by PFA Sensor can be used even in environments like IPA and other organic solvents. SUS is partially used for bracket. Selection guide Model Appearance Features Bend radius (mm) Catalog listing Liquid leak detection 5m R Fiber-optic sensors for tank level detection HPF-D027 / HPF-D0 All-resin structure ensures no metal contamination. Fluorine resin chemical resistance Chemical Acetone:CH2CO Dilute hydrochloric acid: HCl Ammonia: NH Ethanol: C2H5OH Resistant Withstands 5 C R0 Selection guide Model Liquid level detection, 6mm dia. type Liquid level detection, 4mm dia. type Appearance Contact type Liquid cling prevention Heat resistant to 5 C Features Bend radius (mm) Catalog listing R25/R40 R/R0

Chemical-proof fiber units Simply cut the PFA-jacketed cable to and insert as is into the amplifier.

Fluorine resin fiber R HPF-T029 Thru scan Oil and chemical-proof Side view 4.7mm dia. Fluorine resin fiber R HPF-T05 Diffuse scan Oil and chemical-proof 6mm dia.

6 Light axis position of side view type Side view type: Light axis and chamfer HPF-T007 HPF-T07 A chamfer opposite the light beam position on both emitter and receiver makes light axis alignment easy.

4 Chemical-proof fiber units Simply cut the PFA-jacketed cable to and insert as is into the amplifier. HPF-T029 Selection guide Side view type HPF-T05 Model Appearance Features Bend radius (mm) Catalog listing Thru scan Oil and chemical-proof 4.7mm dia. Fluorine resin fiber R HPF-T029 Thru scan Oil and chemical-proof Side view 4.7mm dia. Fluorine resin fiber R HPF-T05 Diffuse scan Oil and chemical-proof 6mm dia. Fluorine resin fiber R/R80 HPF-D014 Notes: HPF-T029/HPF-T05: Standard is. However, 5m size is also available. For details, contact Yamatake Corporation. Fine diameter fiber unit HPF-T Light axis position of side view type Side view type: Light axis and chamfer HPF-T007 HPF-T07 A chamfer opposite the light beam position on both emitter and receiver makes light axis alignment easy. Chamfer Selection guide Model Appearance Features Bend radius (mm) Catalog listing Sleeve: 0.5 dia. Core: 0.25mm dia. (1) dia. Fine diameter sleeve R HPF-T0 Core: 0.125mm dia. (1) 1.5 dia. Fine diameter HPF-T06 Thru scan Core: 0.25mm dia. (1) Sleeve: 0. Core: 0.25mm dia. (1) Sleeve: 0. Core: 0.25mm dia. (1) 1.0 dia. dia. Fine diameter Fine diameter sleeve Fine diameter sleeve 0.5m R R HPF-T08 HPF-T09 HPF-T040 Thru scan side view Diffuse scan Core: 0.88mm dia. (1) Sleeve: 1.5 dia. Core: 0.5mm dia. (2) Sleeve: 0.82 dia. Core: 0.25mm dia. (2) dia. dia. Fine diameter sleeve Fine diameter sleeve Fine diameter 1m 0.5m R5 R HPF-T07 HPF-D021 HPF-D019 4

Bend-tolerant fiber-optic cable For use on moving equipment R4 Repetitive bending test (reference) ±90 bend Detection method Thru scan Diffuse scan Bend Size radius (mm) M 1.5mm dia.

M Catalog listing HPF-T008 HPF-T009 HPF-T0 HPF-D012 HPF-D06 HPF-D07 Measurement conditions Roller diameter: 8mm (R4mm) Load: 500g The HPF-T008 and HPF-T009 do not break even after 1 million

Unbreakable fiber-optic cable (stationary bend type) Because it is made of several hundred bundled fibers, there is no light level drop when the cable is bent.

, side view sleeve R1 HPF-T026 Convention al fiber Unbreakable fiber Diffuse scan M, sleeve For use on a moving unit, bend-tolerant fiber-optic cable is recommended.

5 Bend-tolerant fiber-optic cable For use on moving equipment R4 Repetitive bending test (reference) ±90 bend Detection method Thru scan Diffuse scan Bend Size radius (mm) M 1.5mm dia. R4 1.5mm dia. M Catalog listing HPF-T008 HPF-T009 HPF-T0 HPF-D012 HPF-D06 HPF-D07 Measurement conditions Roller diameter: 8mm (R4mm) Load: 500g The HPF-T008 and HPF-T009 do not break even after 1 million operations under the above test conditions. Unbreakable fiber-optic cable (stationary bend type) Because it is made of several hundred bundled fibers, there is no light level drop when the cable is bent. R1/R2 Even if the cable is bent at a small radius, the light level doesn't change Detection method Size and shape Bend radius (mm) Catalog listing M R1 HPF-T024 Thru scan R2 HPF-T mm dia., side view sleeve R1 HPF-T026 Convention al fiber Unbreakable fiber Diffuse scan M, sleeve For use on a moving unit, bend-tolerant fiber-optic cable is recommended. R1 R2 R1 HPF-D029 HPF-D00 HPF-D01 Mapping fiber-optic sensor HPF-T00 Ultra narrow light beam: aperture angle of -1.5 /+1.5 max. Incoming light level (%) Wafer mapping waveform Double sheets Motion distance (mm) Parallel motion distance (mm) Parallel motion distance characteristics Scanning distance (mm) Scanning distance (mm) Fewer man-hours needed for light axis alignment For a narrow width light, light axis alignment is generally difficult and takes a long time. However, since this model is shipped with the mechanical axis alignment set to 0.8 /+0.8 max. at 500mm scanning distance, the man-hours required for mounting and adjustment can be greatly reduced. Parallel motion distance (mm) Model Appearance Features Bend radius (mm) Catalog listing Mapping fiber-optic sensor Narrow beam, 1.5 /+1.5 max. R5 Note: Since the scanning distance is set at the distance used in shipping inspection, it may differ from the actual scanning capability. 5

Wide Beam Fiber Unit HPF-T021T / HPF-T021S / HPF-T021WT Three choices of light beam width and detection type ensure that meandering or part size can be

5mm 0m Catalog listing HPF-T021 HPF-T021T (with an attached slit sticker) HPF-T021T (with an attached slit sticker) HPF-T021T HPF-T021S HPF-T021WT (with an

Side beam Beam 0mm wide R HPF-T021T HPF-T021S HPF-T021WT Fiber-optic arrays HPF-T021 / HPF-D026 R4 Using an array of 16 light beams, the target object's

(16) Thru scan model HPF-T021 Use of a wide light beam can reduce detection error. x 0.5(=5.

85) Thru scan lens attachment with a narrow beam unit By using a single integrated structure with a lens attachment for long scanning distance and light

6 Wide Beam Fiber Unit HPF-T021T / HPF-T021S / HPF-T021WT Three choices of light beam width and detection type ensure that meandering or part size can be detected. Comparison of light beam widths of wide beam fiber units mm mm 0mm Light beam width 5.25mm 70.5mm 11m m 0.5mm 0m Catalog listing HPF-T021 HPF-T021T (with an attached slit sticker) HPF-T021T (with an attached slit sticker) HPF-T021T HPF-T021S HPF-T021WT (with an attached slit sticker) HPF-T021WT Selection guide Thru scan Model Features Cable (cuttable) Bend radius Catalog listing Wide beam Beam mm wide Beam mm wide Side beam Beam 0mm wide R HPF-T021T HPF-T021S HPF-T021WT Fiber-optic arrays HPF-T021 / HPF-D026 R4 Using an array of 16 light beams, the target object's position, dispersion, opening or notch can be reliably detected. Light axis structure 0.25mm dia. (16) Thru scan model HPF-T021 Use of a wide light beam can reduce detection error. x 0.5(=5.25) Wafer notch detection Lead frame detection Diffuse scan model HPF-D026 1 x 0.5(=.85) Thru scan lens attachment with a narrow beam unit By using a single integrated structure with a lens attachment for long scanning distance and light focusing, diffuse reflection can be prevented. Emitter and receiver fibers are alternately arranged. HPF-T00without lens HPF-T019 ±0 ±Approx. 2 HPF-T00 + HPF-VL06 HPF-T02 ±Approx. 6 ±Approx. 1.5 Catalog listing Scanning distance in HP mode (HPX-AG) HPF-T00 + FE-PA-L1 ±Approx. 6 HPF-T0 ±Approx. 2 HPF-T00 + HPF-VL06 HPF-T00 + FE-PA-L1 14m 8,400mm HPF-T019 4,800mm HPF-T0 5,00mm HPF-T02,600mm 6

Fiber units for vacuum use HPF-V Series HPF-V Series fiber units for vacuum applications can be used in a vacuum and in high-temperature environments.

Suitable for use in a vacuum and in high temperatures (to 50 C) Vacuum furnace wall Top view lens HPF-VL06 Withstands heat to 50 C Straight type SUS spiral Straight type - Pa m /sec max.

Catalog listing Heat resistant to 50 C Elbow connection R25 HPF-VT07 Diffuse scan Heat resistant to 50 C Elbow connection Heat resistant to 50 C Straight connection R25 R25 HPF-VD07 HPF-VD09 Light

7 Fiber units for vacuum use HPF-V Series HPF-V Series fiber units for vacuum applications can be used in a vacuum and in high-temperature environments. When detection through a view port with thru-scan models is unreliable or when a facing view port cannot be installed, the HPF-V Series can be used inside the vacuum chamber. Suitable for use in a vacuum and in high temperatures (to 50 C) Vacuum furnace wall Top view lens HPF-VL06 Withstands heat to 50 C Straight type SUS spiral Straight type - Pa m /sec max. (by He leak test) Elbow type Elbow type To amplifier Side view lens HPF-VL05 Light connector HPF-VJ0 Fiber unit for air HPF-VA01 Selection guide Thru scan Model Appearance Features Bend radius (mm) Catalog listing Heat resistant to 50 C Elbow connection R25 HPF-VT07 Diffuse scan Heat resistant to 50 C Elbow connection Heat resistant to 50 C Straight connection R25 R25 HPF-VD07 HPF-VD09 Light connector Heat resistant to 0 C (2 units) HPF-VJ0 Fiber unit for air For air (2 units) R HPF-VA01 Side view lens Top view lens Heat resistant to 50 C (2 units) Long distance lens Heat resistant to 50 C (2 units) HPF-VL05 HPF-VL06 Limited diffuse scan fiber units HPF-D028T / HPF-D028F Reliable sensing, with almost no negative effects from target object conditions or background. HPF-D028T HPF-D028F Selection guide Model Appearance Features Bend radius (mm) Catalog listing HPF-D028 Limited diffuse scan Limited diffuse scan R HPF-D028T HPF-D028F 1 7 2

"Extension cord" for fiber-optic cables Cables can be extended 5m using the HPF-EU05 fiber-optic extender, sold separately.

Since the HPF-EU05 cannot be used with every type of fiber unit, contact Yamatake Corporation about specific applications.

and on-site evaluation are available. Examples There are many other ways in which fiber units can be customized.

8 "Extension cord" for fiber-optic cables Cables can be extended 5m using the HPF-EU05 fiber-optic extender, sold separately. R4 5m Fiber-optic cable Xm HPF-EU05 5m When the fiber-optic extender is used, there is a light level drop due to the cable and the connecting portion. Since the HPF-EU05 cannot be used with every type of fiber unit, contact Yamatake Corporation about specific applications. Allowable plate thickness for mounting: 1 to 2 mm Fiber unit customization services Various services such as emergency sensor addition, change, sample production and on-site evaluation are available. Examples There are many other ways in which fiber units can be customized. Thru-scan type, small head Limited diffuse scan type, ultra thin type Coaxial diffuse scan type, ultra small diameter sleeve Even smaller Even thinner Even narrower 1.5 dia. 5mm Note: Our smallest standard model is mm. 2.5mm Note: Our thinnest standard model is mm. 0.8 dia. Emitter: 0.25 mm Receiver: x

9 11 HPF-T001 Long distance Core: 1. (1) Long scanning distance R HPF-T002 Core: 1. (1) dia. 11 HPF-T00 Core: (1) Sleeve 1.2 dia. Standard R HPF-T004 Core: (1) dia. Sleeve 1.2 dia. Standard 65 ± 4 5 FIBER UNIT Thru scan Group Appearance Features Cable (cuttable) Bend radius Catalog listing HPF-T005 Core: (1) Sleeve (flexible) R/R 65 ± 4 HPF-T006 Core: (1) dia. Core: (1) M Standard diameter and compact R HPF-T045 Core: 0.5 dia. (1) 11 M Static installation, flexible, and small diameter R1 HPF-T024 Ultra bend - tolerant Core: (1) ± Static installation, flexible, and standard model R2 HPF-T025 HPF-T01 Core: (1) dia. Sleeve ± 12 Static installation, flexible, and side view model R1 HPF-T Elbow R HPF-T0 Core: (1) Space saving Core: 0.5 dia. (1) Static installation, flexible, small diameter, and flat top view model R1 HPF-T028 Core: (1) 1.75 light axis center Front view 2-M. Side view Static installation, flexible, standard, and flat side view model R5 HPF-T028LF ± 12 sleeve R HPF-T007 Sleeve Side view Sleeve 0.88 dia. Fine diameter sleeve 1m R5 HPF-T07 5 Standard diameter R HPF-T042 dia. Small diameter Sleeve 0.5 dia. 5 ± 2 Fine diameter R HPF-T0 Core: 0.25 dia. (1) dia

10 Group Appearance Features Cable (cuttable) Bend radius Catalog listing 6 HPF-T06 Core: dia. (1) 1.5 dia. Fine diameter 6 0.5m HPF-T08 Core: 0.25 dia. (1) 1.0 dia. Sleeve 0. 5 Fine diameter sleeve HPF-T09 Small diameter Core: dia. (1) Sleeve 0. R 60 ± Fine diameter sleeve HPF-T040 Core: 0.25 dia. (1) dia. 22 HPF-T04 Core: 0.5 dia. (1) 2 dia. 11 and long scanning distance HPF-T044 Core: 0.75 dia. (1) M 11 HPF-T008 Core: 0.25 dia. (4) M Elastic small diameter HPF-T009 Elastic Core: 0.25 dia. (4) 1.5 dia. R4 HPF-T046 Core: 0.25 dia. (4) 1.5 dia. 11 Elastic standard diameter HPF-T0 Core: 0.25 dia. (16) 11 To 5 C R25 HPF-T012 Core: (1) 1 To 0 C R5 HPF-T Heat resistant Core: 1.5 dia. (1) Glass fiber: (0.05 dia. x ) (1) ) To 0 C 1m R HPF-T018 Glass fiber: 0.05 dia. (0.05 dia. x 70) 17 0 Heat and cold resistant from -60 C to +50 C R25 HPF-T014 ( incorporated) Parallel beam top view HPF-T019 ( incorporated) R Narrow beam Parallel beam side view HPF-T0 ( incorporated) Narrow beam top view R HPF-T02 Mapping Core: 1.5 dia. (1) 9 ( incorporated) Narrow beam -1.5 /+1.5 max. side view R5 HPF-T00

11 Group Appearance Features Cable (cuttable) Bend radius Catalog listing Array R4 HPF-T Beam mm wide HPF-T021T Wide beam Beam mm wide Side Beam R HPF-T021S Beam 0mm wide HPF-T021WT 11

12 Diffuse scan Group Appearance Features Cable (cuttable) Bend radius Catalog listing Long distance Core: 1. (2) Long scanning distance R HPF-D001 HPF-D002 Standard Core: Standard R HPF-D00 Core: 5 65 ± 4 11 R1 HPF-D029 Core: 0.5 dia. (2) M Standard R2 HPF-D00 Ultra bend - tolerant Core: Sleeve 1.2 dia. Core: 0.5 dia. (2) 40 ± 2 11 sleeve (bendable) R/R1 HPF-D01 Core: 0.5 dia. (emitter core dia.)(1) Core: 0.25 dia. (receiver core dia.)(4) 18 M Coaxial R1/R4 HPF-D02 0 Standard diameter R5 HPF-D044 Core: dia. Compact Core: 1.5 light axis center 2-M. Static installation, flexible, standard, and flat side-view model R2 HPF-D045LF 11 HPF-D004 Core: 0.5 dia. (2) M HPF-D005 Small diameter Core: 0.5 dia. (2) Sleeve 1.2 dia. Core: 0.5 dia. (2) Core: 0.75 dia. (2) Sleeve 0.82 dia. 65 ± 4 11 dia. sleeve long scanning distance R HPF-D006 HPF-D018 Core: 0.25 dia. (2) Sleeve 1.5 dia. ± 2 dia. Fine diameter sleeve 0.5m HPF-D019 Core: 0.5 dia. (2) Sleeve 0.82 dia. ± 2 dia. sleeve HPF-D021 Core: 0.25 dia. (2) 5 ± 2 Fine diameter sleeve 0.5m R4 HPF-D09 Coaxial Core: (emitter core dia.)(1) Core: 0.25 dia. (receiver core dia.)(16) Coaxial R HPF-D009 Core: 0.5 dia. (emitter core dia.)(1) Core: 0.25 dia. (receiver core dia.)(4) 18 M Coaxial R HPF-D0 12

13 Group Appearance Features Coaxial 18 2 Core: 0.25 dia. (emitter core dia.)(1) Core: 0.25 dia. (receiver core dia.)(6) 18 5 Core: 0.5 dia. (emitter core dia.)(1) Core: 0.25 dia. (receiver core dia.)(9) Core: 0.5 dia. (emitter core dia.)(1) Core: 0.25 dia. (receiver core dia.)(9) M M Coaxial Cable (cuttable) Bend radius Catalog listing 0.5m R4 R HPF-D04 HPF-D05 HPF-D08 Core: 0.5 dia. (emitter core dia.)(1) Core: 0.25 dia. (receiver core dia.)(9) Sleeve 2 dia. dia. coaxial HPF-D042 Side view Sleeve 2 dia. Core: 0.5 dia. (2) Sleeve 2 dia. 40 ± 4 dia. sleeve short sleeve R HPF-D011 HPF-D041 Core: 0.5 dia. (2) 2.8 dia. 5 Standard diameter R HPF-D04 6 dia. Core: 0.25 dia. (emitter core dia.)(16) Core: 0.25 dia. (receiver core dia.)(16) Standard HPF-D012 Elastic Core: 0.25 dia. (emitter core dia.)(2) Core: 0.25 dia. (receiver core dia.)(2) dia. sleeve 1m R4 HPF-D06 Core: 0.25 dia. (emitter core dia.)(2) Core: 0.25 dia. (receiver core dia.)(2) M HPF-D07 To 5 C R25 HPF-D01 Core: Core: 1.5 dia. (2) 1 17 To 0 C R5 HPF-D022 Heat resistant 2 14 To 0 C HPF-D02 Glass fiber: 1. Sleeve 2. Glass fiber: Sleeve heat resistant to 0 C 1m R HPF-D024 Glass fiber: 1.5 dia Heat and cold resistant from -60 C to 50 C R25 HPF-D0 (Built-in lens) Parallel beam (.7).5 M5 Parallel beam reflection R HPF-D025 Wide beam 1 Array R4 HPF-D026 Limited reflection 12 (4.5) Limited reflection R HPF-D

14 5 Group Appearance Features Cable (cuttable) Bend radius Catalog listing Dia. 1(2) HPF-D028T Limited reflection Dia. 1(2) Limited reflection R HPF-D028F Wet process Group Appearance Features Oil and chemicalproof Core: dia. (effective lens dia.)(1) (Built-in lens) 4.7 dia. 4.7 dia. PFA tube small diameter Cable (cuttable) Bend radius Catalog listing R HPF-T029 HPF-T05 16 PFA tube R/R80 HPF-D014 Core: 6 dia. Liquid level Pipe-mounted. Light received when liquid present. to 1mm dia. pipes. Pipe-mounted. Light received when liquid absent. 8 to 19mm dia. pipes. 5m R4 HPF-T02 HPF-T04 (60) (Bending not allowed) 6 dia. Contact type. PFA tube 6mm dia. R25/R40 HPF-D027 (40) (Bending not allowed) Contact type. PFA tube 4mm dia. R/R0 HPF-D Liquid leak 1 Contact type 5m R HPF-D Vacuum Group Appearance Features Thru scan Diffuse scan Glass fiber: 1.2 bundle dia. (1) Glass fiber: 1.7 bundle dia. Glass fiber: 1.7 bundle dia Heat resistant to 50 C. Elbow connection Heat resistant to 50 C. Straight connection Cable (cuttable) Bend radius Catalog listing 1m R25 HPF-VT07 HPF-VD07 HPF-VD09 2 Air side (2 units) R HPF-VA01 Core: (8) 22 Heat resistant to 0 C. Light connector (2 units) HPF-VJ

15 ATTACHMENTS (sold separately) Name Appearance Features and applications Applicable fiber unit Catalog listing Micro-spot (0.4mm dia.) lens unit When lens is attached to a diffuse scan fiber unit, light converges to a spot 0.4mm in dia. at a distance of 7mm. HPF-D0, HPF-D04, etc. HPF-LU01 Long-distance micro-spot lens unit When lens is attached to a diffuse scan fiber unit, light converges to a spot m in dia. at a distance of 19mm. HPF-D0, HPF-D04, etc. HPF-LU02 Ultra micro-spot (0.1mm dia.) lens unit When lens is attached to a diffuse scan fiber unit, light converges to a spot 0.1mm in dia. at a distance of 4.6mm. HPF-D0, HPF-D04, etc. HPF-LU07 Long distance spot lens unit When lens is attached to the HPF-D08, light converges to a spot 1.0mm in dia. at a distance of mm. HPF-D08 HPF-LU08 Long-distance lens unit (2 units) Increases scanning distance 6-fold when attached to the light emitter and receiver of a thru-scan fiber unit. Heat resistant to 0 C. HPF-T00, HPF-T004 HPF-T0, HPF-T012 HPF-T014, HPF-T018 FE-PA-L1 Side view unit (2 units) When attached to the light emitter and receiver of a thru scan fiber unit, converts the unit to the side view type. HPF-T00, HPF-T004 HPF-T0, HPF-T012 HPF-T014, HPF-T018 FE-PA-S1 Thru scan ultra long distance lens unit (2 units) Heat resistant to 50 C. This unit can be also used for vacuum applications. HPF-T00, HPF-T014 HPF-VT07, etc. HPF-VL06 Thru scan side view lens unit (2 units) Heat resistant to 50 C. This unit can be also used for vacuum applications. HPF-T00, HPF-T014 HPF-VT07, etc. HPF-VL05 Adjustable angle fiber bracket Can be used with a thru scan fiber unit used as a limited reflection model, or with a side view model. Thru scan fiber unit HPX-PA06 Fiber-optic cable extender This unit is a 5m long fiber optic cable relay unit. HPF-EU05 Fiber head mounting bracket adapter for 1.0mm dia. fiber attachment for 1.mm dia. fiber For mounting a fiber unit head. Fiber head size M Fiber head size Fiber head size This unit is an adapter for 1.0mm dia. fiber (an accessory for applicable fibers). This unit is an adapter for 1.mm dia. fiber (an accessory for applicable fibers). FE-PA-FB1 FE-PA-FB2 FE-PA-FB4 HPF-AT HPF-AT1 Fiber cutter Used to cut fibers to (an accessory for applicable fibers). FE-PA-F1

16 EXTERNAL DIMENSIONS OF FIBER UNITS Thru scan (unit: mm) : Allowable bend radius Ambient operating : temperature : Scanning distance (HP mode) HPF-T001 R -0 to +70 C 2,mm HP-1 HPF-T002 R -0 to +70 C 2,mm HP (core) M2.6 x 0.45 x (core) M2.6 x 0.45 dia. Nut and washer: B type HPF-T00 R -0 to +70 C 1,0mm HP- HPF-T004 R -0 to +70 C 1,0mm HP-16 M2.6 x 0.45 x 0.7 M2.6 x 0.45 (core) (core) dia. Nut and washer: B type 11 HPF-T005 Fiber SUS tube RR -0 to +70 C 1,0mm HP-17 HPF-T006 Fiber SUS tube RR -0 to +70 C 1,0mm HP dia. tube x dia. tube dia. (core) * * (core) * * Nut and washer: B type 65 ± 4 *Bending not allowed 65 ± 4 *Bending not allowed HPF-T007 R -0 to +70 C 145mm HP-19 HPF-T008 R4-0 to +70 C 180mm HP dia. Chamfer (1dia.) ± tube 0.25 dia. (core) (4) M x ± 12 HPF-T009 R4-0 to +70 C 180mm HP-21 HPF-T0 R -0 to +70 C 865mm HP-22 (core) max. () dia. (core) (4) 1.5 dia. Nut and washer: B type dia. () R5 x 0.7 M2.6 x

17 HPF-T012 R25-0 to +5 C 700mm HP- HPF-T014 R25-60 to +50 C 660mm HP-24 (effective) M2.6 x 0.45 x 0.7 Glass fiber 0.05 dia. x 70 1 M2.6 x 0.45 x 0.7 tube Connector (plastic) 5 dia. Nut and washer: B type to +50 C -0 to +70 C HPF-T0 R -0 to +70 C 4mm HP-000 HPF-T017 R5-60 to +5 C 1,0mm HP dia. tube dia dia. x dia. (core) 5 ± dia. (core) 1 17 Nut and washer: B type HPF-T018 R -40 to +0 C 6mm HP-6 HPF-T019 R -0 to +70 C 4,1mm HP-28 Glass fiber (0.05 dia. x ) x 0.7 M2.6 x 0.45 Silicone tube Connector (plastic) 5 dia. Glass lens tube x 0.7 ()* 00 min. ()* 1 Nut and washer: B type 2.8 dia Nut and washer: B type HPF-T0 R -0 to +70 C 4,540mm HP-29 HPF-T021 R4-0 to +70 C 790mm HP Chamfer 0.25 dia. (16) Brass (Cr plating) M (2) C (2.8) x0.5 (=5.25) R -0 to +70 C,600mm R -0 to +70 C,450mm 17

18 HPF-T025 R2-0 to +70 C 865mm HP-0025 M2.6 x 0.45 x 0.7 (core) 11 HPF-T026 R1-0 to +70 C 55mm 6 HPF-T021WT R -0 to +70 C,600mm HPF-T02 R -0 to +70 C,600mm HP-0024 Glass lens 1.7 dia. (effective) tube x 0.7 Nut and washer: B type HPF-T024 R1-0 to +70 C 140mm HP-0026 M x Nut and washer: A type EC2 HPF-T028 R1-0 to +70 C 140mm EC Ni-plated brass () 0.95 Chamfer 45 Stainless steel tube 0.5 dia. (core) 2.4 R (2) 4 2. dia. (2) R (2) ± HPF-T028LF R5-0 to +60 C 2mm HPF-T029 R -0 to +70 C 4,500mm EC184 SUS0. M (2) dia. (lens) 4.7 dia. unit Fluorine resin tube min. 1. dia light axis center 5 HPF-T00 R5-0 to +60 C 500mm HPF-T01 R2-0 to +70 C 865mm ±0.5 (Light axis center) tube 2 dia. (core) dia. (effective dia.) M1.6 dia dia. 0.5 dia. (core)

19 HPF-T02 R4-0 to +70 C HPF-T0 R4-0 to +70 C 940mm 12 Sensing head PFA coating 0.25 dia. (core)(16) M2.6 x 0.45 x min min. 2. dia. (2) 2.2 ± dia. 11 HPF-T04 R4-0 to +70 C HPF-T05 R -0 to +70 C 1,00mm EC dia. Side view unit 4.8 Fluorine resin tube 1. dia. Sensing head PFA coating min. 2. dia. (2) 2.8 dia min. Groove in the fiber head shows the light axis position. HPF-T06 R -0 to +70 C 17mm EC5 HPF-T07 R5-0 to +60 C 55mm EC6 Polyethylene resin 1.2 dia. Nylon resin dia. (core) 1.5 dia min. 2.2 Chamfer (0.88 dia.) dia. tube min. HPF-T08 R -0 to +70 C 4mm EC8 HPF-T09 R -0 to +70 C 17mm EC8 tube (0.) dia. (core) min. Nylon resin 25 HPF-T040 HPF-T042 R -0 to +70 C 5mm R -0 to +70 C 660mm EC60 0. tube Stainless steel dia. Chamfer dia. (core) 60 ± dia. ( dia.) ±0.5 19

20 HPF-T04 R -0 to +70 C 00mm EC55 HPF-T044 R -0 to +70 C 675mm EC61 2 dia. M x 0.5 C0. (2) dia. (core) dia. (core) 11 HPF-T045 R -0 to +70 C 1,0mm EC56 R4-0 to +70 C 180mm M x dia. (core) dia. (core) (4) 1.5 dia.

21 Diffuse scan (unit: mm) HPF-D001 R -0 to +70 C 580mm HP-01 HPF-D002 R -0 to +70 C 40mm HP (core)(2) x 0.75 (2) (core)(2) x 0.75 (2) Nut and washer: D type Nut and washer: D type HPF-D00 R -0 to +70 C 40mm HP-0 HPF-D004 R -0 to +70 C 1mm HP-04 tube x ± 4 (2) 0.5 dia. (core)(2) M x 0.5 (core)(2) Nut and washer: D type Nut and washer: A type 11 HPF-D005 R -0 to +70 C 1mm HP-05 HPF-D006 R -0 to +70 C 1mm HP dia. (core)(2) dia. 1.2dia. tube x 0.7 * * 65 ± dia. (core)(2) Nut and washer: B type *Bending not allowed HPF-D009 R -0 to +70 C 40mm HP-07 HPF-D0 R -0 to +70 C 95mm HP-08 (emitter core) x 0.75 (2) 0.5 dia. (emitter core) M x dia. (receiver core)(16) 0.25 dia. (receiver core)(4) (Dummy 0.25 dia. (5)) 18 Nut and washer: D type Note: Emitter fiber is marked with a white line. Note: Emitter fiber is marked with a white line. HPF-D011 R -0 to +70 C 45mm HP-09 HPF-D012 R4-0 to +70 C 265mm HP- 2.8 (2 dia.) dia. tube dia dia. (emitter core)(16) 1.8 dia. x 0.75 (2) ± dia. (receiver core)(16) 21

22 HPF-D01 R25-0 to +5 C 190mm HP-02 HPF-D014 R80-0 to +70 C 190mm HP-11 5 dia. (Fluorine resin tube) (effective)(2) Nut and washer: D type x 0.75 (2) (5 dia.) (6 dia.) 16 () 1900 min. (2) HPF-D0 R25-60 to +50 C 160mm HP-12 HPF-D018 R -0 to +70 C m 1.5 dia. (0.05 dia. x 70 (2)) (Glass fiber) x dia. tube dia. 0 Relay bracket () -60 to +50 C -60 to +1 C -0 to +70 C 60 Connector (plastic) 1 (2) 5 dia. (2) 0.75 dia. (core)(2) 0.5 dia. (dummy)(2) x 0.7 Nut and washer: D type HPF-D019 R -0 to +70 C 11mm EC040 HPF-D021 R -0 to +70 C 95mm 0.25 dia. (core)(2) 0.82 dia. tube dia. 0.5 dia. (core)(2) 1.5 dia. tube dia. ± min. ± 2 HPF-D022 R5-60 to +0 C 40mm HP-1 HPF-D02 R -40 to +0 C 190mm HP dia. (core)(2) (2) 4.9 dia. x (2) 2 x dia dia. 0 Silicone tube Silicone tube 2 00 min. Connector (plastic) 1 5 dia. Glass fiber 1. (0.05 dia. x (2)) HPF-D024 R -40 to +0 C 190mm HP- HPF-D025 R -0 to +70 C mm HP tube 70 Glass fiber 1. (0.05 dia. x (2)) x dia (9 dia.) (0) Silicone tube Silicone tube Connector (plastic) 5 dia min. Nut and washer: E type Nut and washer: C type (.7) Note: Emitter fiber is marked with a white line. Aluminum 1.2 M5 x

23 HPF-D026 R4-0 to +70 C 290mm HP-4 HPF-D (8) 1 Fiber Tube R25R40 Resin head -0 to +0 C (60) (Bending not allowed) HP-008 Heat shrinkable fluorine resin tube (PFA) 6. Fluorine resin tube (PFA) 6 dia. 0 min. (2) 4 4 HPF-D028 R -0 to +70 C mm HP-002 HPF-D028T R -0 to +70 C mm (light axis) Aluminum (black alumite) (4.5) dia. (2) 6 dia. (4).2 dia. (2).2 dia. (2) Mounting hole 4 x 90 HPF-D028F R -0 to +70 C mm HPF-D029 R1-0 to +70 C 25mm HP dia. (core)(2) Nut and washer: A type 11 M x dia. (4).2 dia. (2) Mounting hole 4 x 90 HPF-D00 R2-0 to +70 C mm HP-0027 HPF-D01 Tube Fiber RR1-0 to +70 C 25mm HP-006 (core) (2) x 0.75 (2) 0.5 dia. (core) (2) tube x dia. 40 ± 2 11 Nut and washer: D type Nut and washer: B type HPF-D02 Emitter Receiver R1R4-0 to +70 C 50mm HP-005 HPF-D0 Fiber Tube RR0-0 to +5 C EC0 0.5 dia. (emitter core) 0.25 dia. (receiver core)(4) (Dummy 0.25 dia. (5)) Nut and washer: A type M x (4.5) 1 Resin head Heat shrinkable fluorine resin tube (PFA) 4. Fluorine resin tube (PFA) (40)(Bending not allowed) 500 min. Note: Emitter fiber is marked with a white line. 2

24 HPF-D04 R4-0 to +70 C 70mm EC04 HPF-D05 R -0 to +70 C 95mm EC dia. (emitter core) M x 0.5 dia. (0.9 dia.) (emitter) Connector (plastic).5 dia. (2) (2) 0.5 dia. (emitter core) M x 0.5 dia dia. (2) 0.25 dia. (receiver core)(6) min. (1.6 dia.) (receiver) 1 Nut and washer: A type 0.25 dia. (receiver core)(9) 18 5 Nut and washer: A type Note: Emitter fiber is marked with a white line. Note: Emitter fiber is the thinner one (0.9mm dia.). HPF-D06 R4-0 to +70 C 17mm EC188 HPF-D07 R4-0 to +70 C 21mm EC dia. (emitter core)(2) 1.5 dia. Polyethylene tube 1.2 dia. dia. Connector (plastic) Polyethylene tube 1.2 dia..5 dia. (2) (2) 0.25 dia. (emitter core)(2) M x dia. (receiver core)(2) (0 ± ) 00 min dia. (receiver core)(2) Nut and washer: A type HPF-D08 R -0 to +70 C 95mm EC186 HPF-D09 R4-0 to +70 C 11mm EC dia. (emitter core) x dia. (2) 0.25 dia. (core)(2) 0.82 dia. tube 0.25 dia. (receiver core) (9) 16 5 ± min. Nut and washer: B type Note: Emitter fiber is marked with a white line. HPF-D040 R -0 to +70 C EC28 HPF-D041 R -0 to +70 C 45mm EC min. PFA coating Sensor body Chamfer 1 1 Mounting base (body) dia. Mounting base (bushing). hole dia. tube 2.8 dia HPF-D042 R -0 to +70 C 0mm EC58 HPF-D04 R -0 to +70 C 180mm EC dia. (emitter core) tube 5.7 Chamfer 2 dia. dia dia. (receiver core) 22 6 dia. (2) 1 2 Note: Emitter fiber is marked with a white line. 5 6 dia. 1.5 ±

25 HPF-D044 R5-0 to +70 C 240mm HPF-D045LF R2-0 to +70 C 5mm EC59 SUS0 (core)(2) dia. 0 Heat-shrink tube (2) M (2) (2) 1.5 light axis center Vacuum models (unit: mm) HPF-VT07 M2.6 x 0.45 x 0.7 R25-40 to +50 C 60mm (SUS04) tube (SUS04) EC27 (SUS04) (SUS04) HPF-VD07 x 0.75 R25-40 to +50 C 5mm tube (SUS04) (SUS04) EC196 (SUS04) (SUS04) 0 Glass fiber Bundle 1.2 dia. (2.9 dia.) 00 min. Fixing nut: stainless steel (SUS04) Internal thread M5 x 0.8 depth 7 dia max..5 dia. 4.1 dia max. (SUS04) 5 Glass fiber Bundle 1.7 dia. 12 dia. 00 min. Fixing nut : (SUS04) Internal thread: M5 x 0.8 depth 7 (2.9 dia.) HPF-VD09 R25-40 to +50 C 5mm EC04 HPF-VA01 R -0 to +70 C EC041 Glass fiber Bundle 1.7 dia. x tube (SUS04) (SUS04) 12 dia. Fixing nut : stainless steel Internal thread: M5 x 0.8 depth 7 (SUS04) (2.9 dia.).5 dia. 00 min dia dia. Fixing nut: stainless steel Internal thread: M5 x 0.8 depth 7 8 dia. HPF-VJ0-40 to +0 C EC (8) (9.2) 12 dia. 5 dia. 1 dia..5 max max. (SUS04) max. Glass rod 1.5 dia. 1.4 M5 x M5 x 0.8 (SUS04) Air side Vacuum side Allowable mounting plate thickness: 8 to mm 25

26 EXTERNAL DIMENSIONS OF ATTACHMENT HPF-LU HPF-LU HP-0 M x dia. 4.4 Knurled finish dia. With HPF-D0/D02 (1.6) (18) (17) With HPF-D05 (6.6) (5) (18) M x dia. 4.4 Knurled finish.5 4. dia. With HPF-D0/D02 (25.1) (18) (.5) With HPF-D05 (0.1) (5) (18) (17) (.5) HPF-LU EC05 HPF-LU M x 0.5 Knurled finish With HPF-D04/D05 (6.6) x 0.7 With HPF-D08 (41.8) 5 dia. 4. dia. (18) 9.5 dia. (16) (17) 0.8 (0.8) FE-PA-L FE-PA-S M2.6 x M2.6 x 0.45 Knurled finish 2.8 dia. Knurled finish HPF-VL HPF-VL HPX-PA06 HPF-EU05 R4-25 to +60 Fiber optic cable mount/dismount lever 26.6 Plastic fiber (16 x 0.25 core dia.) dia. (light axis).5 dia. 9 : Allowable bend radius : Ambient operating temperature Knurled finish M2.6 x 0.45 M2.6 x dia. hole 4 8 dia (light axis center) hole 4.5 M screw with slit (2) M screw.2 dia. hole (2) min. (2) Hexagonal nut and toothed lock washer Allowable mounting plate thickness: 1.0 to 2.0 mm Nut types (A, B, C, D and E) do not have a part number, but are accessories of the fiber optic units. There is no catalog listing. (unit: mm) Type AM x 0.5 Type B x 0.7 Type CM5 x 0.5 Type D x

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