E32 Series. Fiber Units Support an Increasing Range of Applications. Fiber Units. Features. Standard Models First, Our Standard Lineup Page 18

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Photoelectric Units Units Support an Increasing Range of s Standard Models Models available in a wide variety of shapes

environmental conditions Special-beam/-specific Models Models that offer top-quality detection performance Be sure to read Safety

Features Standard Models First, Our Standard Lineup Page 18 These s Units can be used in a variety of applications, such as

A Wide Variety of Shapes for Adapting to Different Installation Locations Choose the model that suits the installation space from

Space Savings and Simple Mounting Flat Models Flat models that allow simple screw mounting and straightforward wiring have been

Flat model Screw-shaped Cylindrical Flat Equipped with sleeve Flexible, Pliable That Can Be Handled Like Wire We have developed a

Multicore (flexible) fiber is a new type of standard fiber that can be used like wire without worrying about the bending radius.

Detect Workpieces in Tight Spaces Custom-produced Sleeves Models with sleeves allow detection in tight spaces.

1 Photoelectric Units Units Support an Increasing Range of s Standard Models Models available in a wide variety of shapes customization service for virtually any application Environment-resistive Models An array of models for a variety of environmental conditions Special-beam/-specific Models Models that offer top-quality detection performance Be sure to read Safety Precautions on page 69. Features Standard Models First, Our Standard Lineup Page 18 These s Units can be used in a variety of applications, such as positioning and detecting the presence of workpieces. A Wide Variety of Shapes for Adapting to Different Installation Locations Choose the model that suits the installation space from a wide variety of shapes and sizes (7 shapes, in standard or small sizes). Space Savings and Simple Mounting Flat Models Flat models that allow simple screw mounting and straightforward wiring have been added to the lineup. Using these models eliminates the problem of fibers getting caught on surrounding objects. Flat model Screw-shaped Cylindrical Flat Equipped with sleeve Flexible, Pliable That Can Be Handled Like Wire We have developed a broad range of fibers to meet a wide variety of needs. Multicore (flexible) fiber is a new type of standard fiber that can be used like wire without worrying about the bending radius. We have also produced fiber that will not break when used in moving parts and fiber that is not degraded by contact with oil. Detect Workpieces in Tight Spaces Custom-produced Sleeves Models with sleeves allow detection in tight spaces. We will perform the time-consuming task of fashioning the sleeve, with a length and bends to suit the space (except for ultrafine sleeves). Length Can Be Specified in 1-m Units Saving Energy and Work Models with sleeves We will produce fiber of the required length (in meter units). For largescale installations, specifications of up to 20 m can be handled. (ations of 0. m and 0.5 m are also possible.) Conventional fiber Flexible fiber You will certainly appreciate the ease of use that flexible fiber ensures. 16

Photoelectric Special-beam Models Detection with Increased Reliability Page 22 A variety of heads incorporating the latest optical technology makes it possible to solve

Resistant to dust and dirt Capable of detecting small workpieces Resistant to workpiece vibration Use these models to handle unstable detection conditions.

These models enable detection in high-temperature environments and vacuums.

Chemical-resistant models High-temperature environments Environments subject to the splattering of chemicals Vacuums Use these models to handle applications in special

2 Photoelectric Special-beam Models Detection with Increased Reliability Page 22 A variety of heads incorporating the latest optical technology makes it possible to solve common problems related to detection and to increase reliability. Resistant to dust and dirt Capable of detecting small workpieces Resistant to workpiece vibration Use these models to handle unstable detection conditions. Small-spot models E2-C42 + Area-sensing models E9-FA E2-T16J We have developed model variations for adapting to a variety of environmental conditions. These models enable detection in high-temperature environments and vacuums. Convergent-reflective models E2-L24L High-power models E2-T17L Environment-resistive Models High Resistance to External Conditions with Page 26 Heat-resistant models Chemical-resistant models High-temperature environments Environments subject to the splattering of chemicals Vacuums Use these models to handle applications in special environments. -specific Models Units for the Food-packaging, Semiconductor, and FPD Industries Page 28 These models, which were developed for specific applications, offer top-quality detection performance. Label detection Liquid-level detection Alignment and mapping of glass substrates Wafer mapping Use these models for specific applications. Label-detection models E2-G14 Alignment-check models E2-L16 Liquid-level detection models E2-D6T 17

Photoelectric Features/s Standard Models Flexible (New Standard) Perform wiring without worrying about the bending radius. Choose the model to suit the installation space from a variety of shapes.

cores are all surrounded by cladding. As a result, the fiber is flexible and can be bent without significantly reducing the light intensity.

3 Photoelectric Features/s Standard Models Flexible (New Standard) Perform wiring without worrying about the bending radius. Choose the model to suit the installation space from a variety of shapes. Flexible fiber Conventional fiber Fewer problems Light intensity affected by bends in fiber broken by getting caught on surrounding objects Feature: Multicore (Flexible) s A large number of ultrafine cores are all surrounded by cladding. As a result, the fiber is flexible and can be bent without significantly reducing the light intensity. This helps solve problems, such as fiber being broken by getting caught on other objects. Ratings and ations Min. detectable mm dia. object Min. bending radius Ambient temperature material 1 mm 40 to 70 C (with no icing or condensation) Plastic Cores Cladding R Standard Choose the model to suit the installation space from a variety of shapes. New flat models allow space savings and simple installation. Feature: Flat Models Flat models, which allow simple attachment and wiring, have been added to the lineup. Choose the model to suit the installation space from sensing directions and 2 sizes, standard and small. Ratings and ations Min. detectable object mm dia. Min. bending radius or mm* Ambient temperature 40 to 70 C (with no icing or condensation) Screw-shaped Cylindrical Flat Equipped with sleeve material Plastic * Depends on the fiber diameter. Break-resistant Bundle-fiber models can be used for moving parts. Capable of withstanding at least one million repeated bends (in typical applications). Feature: Bundle s The Units contain a large number of independent fine fibers, ensuring a high degree of flexibility. Ratings and ations Min. detectable object Min. bending radius Ambient temperature material mm dia. 4 mm (withstands repeated bending) 40 to 70 C (with no icing or condensation) Plastic B 18

Photoelectric Fluorine Coating degradation due to oil is prevented using a fluororesin coating. Free cutting is possible with cutter provided. Oil is blocked!

4 Photoelectric Fluorine Coating degradation due to oil is prevented using a fluororesin coating. Free cutting is possible with cutter provided. Oil is blocked! Feature: Fluorine Coating Fluororesin is used as the sheath material to prevent fiber degradation resulting from oil adhesion. Note: The tip of the head is not chemical-resistant. Ratings and ations Min. detectable object Min. bending Ambient temperature material mm dia. 4 mm 40 to 70 C (with no icing or condensation) Plastic (Cross section) Fluororesin coating U Customization Service ( Length, Sleeve Length, and Bends) This customization/delivery service applies to standard models. It is aimed at reducing industrial waste and simplifying the installation procedure. Length Length vs. Distance Through-beam Units Units with Reflective Applicable Models Standard models Model Number Used for Ordering Standard model number + length length: 0. m, 0.5 m, or any length from 1 to 20 m (in 1-m units) Sleeve Length and Bends Applicable Models E2-TC200B/E2-TC200F E2-DC200B/E2-DC200F The E2-DC200B cannot be bent. ( length of 2 m corresponds to 0%.) distance (%) length (m) ( length of 2 m corresponds to 0%.) Model Number Used When Changing Only the Sleeve Length L Model Number Used When Changing the Sleeve Length and Bends distance (%) Model: E2- *1 C200 *2 -S * length (m) Total length Total length L1 L2 R R Model Numbers Incorporating the Bending Radius, R, and Dimensions L1 and L2 Specifying L1 Only (Units: mm) Specifying L2 Only (Units: mm) Bending L1 (±1) radius Model R5 E2- *1 C200 *2 -S * A1 15 E2- *1 C200 *2 -S * A2 R7.5 1 E2- *1 C200 *2 -S * B E2- *1 C200 *2 -S * B2 R 15 E2- *1 C200 *2 -S * C1 20 E2- *1 C200 *2 -S * C2 R E2- *1 C200 *2 -S * D1 2 E2- *1 C200 *2 -S * D2 Bending Model L2 (±1) radius 5 E2- *1 C200 *2 -S * A R5 E2- *1 C200 *2 -S * A4 R7.5 R R E2- *1 C200 *2 -S * B E2- *1 C200 *2 -S * C E2- *1 C200 *2 -S * D E2- *1 C200 *2 -S * B4 E2- *1 C200 *2 -S * C4 E2- *1 C200 *2 -S * D4 *1. Insert "T" for Through-beam Units and "D" for Units with Reflective. *2. Insert the "B" or "F" that appears at the end of the original model number. *. Insert "50" if the total length is 50 mm. The total length must not exceed 120 mm. 19

5 Photoelectric Overview of Model Variations Through-beam Units Shape of head Screw-shaped (top-view) M4 M4 M Type *2 Flexible (New Standard) Flexible and pliable E2-T11N 50 Standard Break-resistant Withstands repeated bending Fluorine coating Cable protected against oil E2-T11R E2-TC200 E2-T11 E2-T11U E2-T21R E2-TC200E E2-T21 distance (mm) *1 R B U (Cross section) Fluororesin coating (with sleeve) M4 (1.2-dia. sleeve) E2-TC200BR E2-TC200B M (0.9-dia. sleeve) E2-TC200FR E2-TC200F Cylindrical (top-view) 1.5 dia E2-T12R E2-T12 E2-T12B E2-T22R E2-T222 E2-T22B (side-view) E2-T14LR E2-T14L 1 dia. E2-T24R E2-T24 Flat (top-view) E2-T15XR E2-T15X E2-T15XB (side-view) E2-TXR E2-TX E2-TXB E2-T15YR E2-T15Y E2-TYR E2-TY (flat-view) 15 8 E2-T15ZR E2-T15Z E2-TZR E2-TZ 20 *1. The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). *2. These symbols are defined as follows. : Flexible fiber, : Bendable fiber, : Fluorine-coated fiber. R B U

6 Photoelectric Units with Reflective Shape of head Screw-shaped (top-view) (with sleeve) Cylindrical (top-view) (side-view) M6 M6 M M6 M Type *2 M6 (-dia. sleeve) M (1.2-dia. sleeve) (1.5 dia.) 6 dia. 2 dia. Flat (top-view) (side-view) (flat-view) Flexible (New Standard) Flexible and pliable E2-D11N E2-C11N E2-C1N Standard Break-resistant Withstands repeated bending *1. The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). *2. These symbols are defined as follows. : Flexible fiber, : Bendable fiber, : Fluorine-coated fiber. Fluorine coating Cable protected against oil E2-D11R E2-DC200 E2-D11 E2-D11U E2-D21R E2-DC200E E2-D21 E2-DC200BR E2-DC200FR E2-DC200B 0 80 E2-DC200F E2-D12R E2-D12 E2-D221B E2-D22R E2-D22 E2-D22B E2-D14LR E2-D24R 45 1 E2-D14L 15 0 E2-D E2-D15XR E2-D15X E2-D15XB E2-DXR E2-DX E2-DXB E2-D15YR E2-DYR E2-D15ZR E2-DZR 40 0 E2-D15Y 8 20 E2-DY 40 0 E2-D15Z 8 20 E2-DZ distance (mm) *1 R B U R B U (Cross section) Fluororesin coating 21

Photoelectric Special-beam Models Long Distance, High Power Powerful beam reduces influence of dust and dirt.

s Detecting parts inside (translucent) containers Detecting workpieces in coating processes E2-T14 Overview of Model Variations Ratings and ations Ambient

Reflective Equipped with large lens 20,000 E2-T17L Side-view, screw mounting,400 E2-T14 M4 screw 1,0 E2-T11L Equipped with large lens 700 E2-D16 M6 screw

Ultracompact, Ultrafine Sleeve Ultracompact head can be installed in tight spaces.

s Alignment inspections Detection of terminals E2-D E2-T-S5 1 dia. Ratings and ations E2-T22R 0.22 dia. E2-T4-S5 0.5 dia. Min.

7 Photoelectric Special-beam Models Long Distance, High Power Powerful beam reduces influence of dust and dirt. Long sensing distance enables use in large-scale installations. s Detecting parts inside (translucent) containers Detecting workpieces in coating processes E2-T14 Overview of Model Variations Ratings and ations Ambient temperature material E2-T11L 40 to 70 C (with no icing or condensation) Plastic E2-T17L Type Features Shape, sensing distance (mm)* Model Through-beam Reflective Equipped with large lens 20,000 E2-T17L Side-view, screw mounting,400 E2-T14 M4 screw 1,0 E2-T11L Equipped with large lens 700 E2-D16 M6 screw 400 E2-D11L * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). Ultracompact, Ultrafine Sleeve Ultracompact head can be installed in tight spaces. Ultrafine sleeve ensures reliable detection of small objects, such as electronic components. s Alignment inspections Detection of terminals E2-D E2-T-S5 1 dia. Ratings and ations E2-T22R 0.22 dia. E2-T4-S5 0.5 dia. Min. detectable object Ambient temperature Material mm dia. 40 to 70 C (with no icing or condensation) Plastic E2-D Overview of Model Variations Type Features Shape, sensing distance (mm)* Model 1-dia. cylinder 10 E2-T22R Throughbeam 0.5-dia. sleeve (0.-dia. opening) 44 E2-T-S dia. sleeve (0.1-dia. opening) 5 E2-T4-S5 Reflective 0.8-dia. sleeve 16 E2-D 0.5-dia. sleeve E2-D1 * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). 22

40 to 70 C (with no icing or condensation) Plastic E2-C1 + E9-FC Overview of Model Variations Type Features Shape, sensing distance (mm)* Model Coaxial, reflective Coaxial, M6 screw 00 E2-CC200

8 Photoelectric Coaxial, Small Spot Small spot diameter (0.1 mm min. in diameter) enables the reliable detection of small workpieces. Use of red light ensures easy visual recognition and simple positioning. E2-C42 + E9-FA s Detecting of CDs Ratings and ations Min. detectable object Ambient temperature material mm dia. 40 to 70 C (with no icing or condensation) Plastic E2-C1 + E9-FC Overview of Model Variations Type Features Shape, sensing distance (mm)* Model Coaxial, reflective Coaxial, M6 screw 00 E2-CC200 Coaxial, -dia. cylinder 150 E2-D2L Small spot Small variable spot Long distance, small spot Long distance, parallel light 0.1-dia. spot at a distance of 7mm Spot diameter variable in the range 0.1 to 0.6 mm at distances in the range 6 to 15 mm 0.5-dia. spot at 17 mm Spot diameter of 4 mm max. at distances in the range 0 to 20 mm E2-C41 + E9-FA-5 E2-C42 + E9-FA E2-C1 + E9-FB E2-C1 + E9-FC * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). 7 mm 0.1 mm dia. spot E2-C41 + E9-FA-5 6 mm 15 mm Variable from 0.1 to 0.6 dia. E2-C42 + E9-FA 17 mm 0.5 mm dia. E2-C1 + E9-FB 20 mm 4 mm dia. E2-C1 + E9-FC 11 mm 2

Photoelectric Fine Beam (Narrow Vision Field) Fine beam reduces unwanted light in surrounding area.

s Alignment inspection of orientation flats Approx. 60 Approx. 4 E2-T22S Ratings and ations 100 mm E2-T24S Min.

Variations Type Features Shape, sensing distance (mm)* Model Throughbeam Top view 1,900 E2-T22S Side view 1,00 E2-T24S *

Area These Units ensure greater reliability with the detection of position inconsistencies in passing workpieces and the

Wide sensing bands of 11 and 0 mm (through-beam models) enable the detection of large position inconsistencies.

Ambient temperature material 40 to 70 C (with no icing or condensation) E2-T16W@ only: to 55 C Plastic Overview of Model

9 Photoelectric Fine Beam (Narrow Vision Field) Fine beam reduces unwanted light in surrounding area. Powerful beam allows use in applications requiring a long sensing distance. s Alignment inspection of orientation flats Approx. 60 Approx. 4 E2-T22S Ratings and ations 100 mm E2-T24S Min. bending radius Ambient temperature material mm 40 to 70 C (with no icing or condensation) Plastic Overview of Model Variations Type Features Shape, sensing distance (mm)* Model Throughbeam Top view 1,900 E2-T22S Side view 1,00 E2-T24S * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). Area These Units ensure greater reliability with the detection of position inconsistencies in passing workpieces and the presence of workpieces with holes. Wide sensing bands of 11 and 0 mm (through-beam models) enable the detection of large position inconsistencies. s Detecting passage of candies Detecting chips on film E2-T16WR E2-T16PR 0mm E2-T16WR E2-D6P1 11 mm Ratings and ations Ambient temperature material 40 to 70 C (with no icing or condensation) E2-T16W@ only: to 55 C Plastic Overview of Model Variations Type Features Shape, sensing distance (mm)* Model Through-beam width: 11 mm 840 E2-T16PR width: 11 mm Flat-view 750 E2-T16JR width: 0 mm 1,00 E2-T16WR Reflective Beam width: 11 mm 150 E2-D6P1 * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). 24

Photoelectric Retro-reflective The return optical path ensures that more light is interrupted by transparent workpieces than with throughbeam models.

E2-R16 s Detecting translucent medicine Ratings and ations Ambient temperature material E2-R21: 40 to 70 C E2-R16: to 55 C (with no icing or condensation) Plastic

mounting, long distance 1,500 E2-R16 * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode).

The optical-axis direction can be selected according to the installation space.

distance (mm)* Model Convergent-reflective Detection range E2-L24L Ultracompact, flat-view Ideal for checking stocks of glass substrates Heat-resistant up to 5 C,

10 Photoelectric Retro-reflective The return optical path ensures that more light is interrupted by transparent workpieces than with throughbeam models. Equipped with MSR function to eliminate light reflected directly from the workpiece. E2-R16 s Detecting translucent medicine Ratings and ations Ambient temperature material E2-R21: 40 to 70 C E2-R16: to 55 C (with no icing or condensation) Plastic E2-R21 Overview of Model Variations Type Features Shape, sensing distance (mm)* Model Retro-reflective MSR function, M6 screw 0 E2-R21 MSR function, screw mounting, long distance 1,500 E2-R16 * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). Convergent-reflective Convergent-reflective models eliminate light reflected from distant objects. Small level differences can be reliably detected. The optical-axis direction can be selected according to the installation space. s Detecting connector pins Detecting wafers (glass substrates) Non-detection range E2-LL E2-L24L Overview of Model Variations Type Features Shape, sensing distance (mm)* Model Convergent-reflective Detection range E2-L24L Ultracompact, flat-view Ideal for checking stocks of glass substrates Heat-resistant up to 5 C, top-view Ideal for checking stocks of glass substrates, flat-view Ratings and ations Min. detectable object material mm dia. Plastic 200 C models only: Glass 5.4 to 9 (center: 7.2) 0 to 4 E2-L24S E2-LL 0 to 15 E2-A Heat-resistant up to 200 C, flat-view 4 to E2-L86 * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode).

Photoelectric Environment-resistive Models Heat-resistant These Units can be used for various applications in temperatures up to 400 C.

screw 760 E2-T51 40 to 200 C L-shaped, long distance Ratings and ations 150 C models 200 C and higher models E2-T81R E2-D81R 1,00 E2-T84S-S 60 to 50 C M4 screw 450 E2-T61-S All other models Min.

E2-D7-S * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode).

11 Photoelectric Environment-resistive Models Heat-resistant These Units can be used for various applications in temperatures up to 400 C. s Detecting wafers in hightemperature environments E2-T61-S E2-T84S-S Overview of Model Variations Type Through-beam Ambient temperature Features Shape, sensing distance (mm)* Model 40 to 150 C M4 screw 760 E2-T51 40 to 200 C L-shaped, long distance Ratings and ations 150 C models 200 C and higher models E2-T81R E2-D81R 1,00 E2-T84S-S 60 to 50 C M4 screw 450 E2-T61-S All other models Min. bending radius 5 mm mm mm material material (fluororesin coating) Glass (fluororesin coating) Glass (SUS spiral coating) Reflective 60 to 50 C M6 screw 90 E2-D61-S 40 to 400 C M6 screw with sleeve 60 E2-D7-S * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). Chemical-resistant lens and high-power beam reduce the influence of dirt and drops of water. Round design prevents drops of water sticking to the head (E2-T11F). s Detecting workpieces in cleaning processes E2-T12F Overview of Model Variations Type Features Shape, sensing distance (mm)* Model Through-beam E2-T14F Ratings and ations Ambient temperature material All other models E2-T51F E2-T81F-S 40 to 70 C 40 to 150 C 40 to 200 C Plastic (fluororesin coating) Water-resistant round head E2-T11F lens, high power,000 E2-T12F Heat-resistant up to 200 C 700 E2-T81F-S Glass (fluororesin coating) Reflective lens, high power 95 E2-D12F * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). 26

12 Photoelectric Vacuum-resistant These models can be used in high-vacuum environments at pressures from 5 to 0.1 Pa. The 4-channel multi-flange, which has a maximum leakage rate of 1 Pa m /s, contributes to space savings. s (Configuration Example) Lens Unit E9-F1V Ratings and ations Min. bending radius material Vacuum chamber Unit on vacuum side (set of 2) E2-T51V E2-T54V E2-T84SV Vacuum side Flange E2-VF4 (4 CH) E2-VF1 (1 CH) 120 C models 200 C models 0 mm mm Glass (fluororesin coating) Atmospheric-pressure side Units on atmosphericpressure side (set of 2) E2-TV Glass (SUS spiral coating) Atmosphericpressure side Plastic Unit EX-DA-S EX Overview of Model Variations Type Features Shape, sensing distance (mm)* Model Through-beam M4 screw, top-view, heatresistant up to 120 C, long distance L-shaped, heat-resistant up to 120 C L-shaped, long distance, heatresistant up to 200 C 1,000 E2-T51V+ E9-F1V 10 E2-T54V 1M 480 E2-T84SV 1M * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode.) Units on Atmospheric-pressure Side Appearance Type Model Common E2-TV 2M Flanges Appearance Type Model 4-channel flange E2-VF4 1-channel flange E2-VF1 Ratings and ations Number of channels 4 channels 1 channels Item Model E2-VF4 E2-VF1 Leakage rate 1 Pa m /s max. Ambient temperature Operating: to 55 C Storage: to 55 C Material Aluminum (A5056) Stainless steel (SUS04) Aluminum (A5056) Flange-seal material Fluorocarbon rubber (Viton) Weight (packed state) Approx. 280 g Approx. 240 g 27

Photoelectric -specific Models Label Detection lens and high-power beam enable the reliable detection of labels through a mounting board.

s Detecting labels E2-G14 mm E2-G14 Ratings and ations Ambient temperature material Degree of protection 40 to 70 C (with no icing or condensation) Plastic IP67 Overview of Model Variations Type

distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). Area sensing is possible with minimal influence from bubbles and drops of water (E2-A01/A02/D6T).

$detected using the refractive properties of light.$

13 Photoelectric -specific Models Label Detection lens and high-power beam enable the reliable detection of labels through a mounting board. These Units can be washed with hydrogen peroxide, making them ideal for the food industry. s Detecting labels E2-G14 mm E2-G14 Ratings and ations Ambient temperature material Degree of protection 40 to 70 C (with no icing or condensation) Plastic IP67 Overview of Model Variations Type Features Shape, sensing distance (mm)* Model Through-beam Slot sensor, no adjustment of optical axis required E2-G14 Screw mounting, side-view,400 E2-T14 Liquid-level Detection * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). Area sensing is possible with minimal influence from bubbles and drops of water (E2-A01/A02/D6T). For safety when disconnections occur, two models have been developed, a light ON model for liquid presence and a light ON model for liquid absence (E2-A01/A02). Tube-mounting model Liquid-contact model Operating Principle Tube-mounting model Tube Air Liquid Liquid-contact model No liquid present Liquid present Air Liquid The presence/absence of liquid is detected using the refractive properties of light. More specifically, it utilizes the fact that the difference in refractive index between the air and the tip/tube is larger than the difference between the liquid and the tip/tube. E2-D6T Overview of Model Variations Type Features Shape, sensing distance (mm)* Model Tube-mounting E2-D82F1 Light ON when liquid is present (ideal for checking lower limits) Light ON when liquid is absent (ideal for checking for overflow) No restriction on tube diameter, resistant to bubbles and drops of water Applicable tube: Transparent tube with a diameter of.2, 6.4, or 9.5 mm and a recommended wall thickness of 1 mm Applicable tube: Transparent tube with a diameter in the range 6 to 1 mm and a recommended wall thickness of 1 mm Applicable tube: Transparent tube (no restriction on diameter) E2-A01 E2-A02 E2-D6T Liquid contact Heat-resistant up to 200 C, shape prevents liquid buildup Liquid-contact model E2-D82F1 * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). 28

E2-L16-N Engineering Data (E2-A07/A08/L16-N) Detection-Position Characteristic (Typical Examples) distance, Y (mm) E2-A07 20 15 5 0 E2-A08 E2-L16-N.0.5 4.5 5.0 6.

14 Photoelectric Glass-substrate Alignment There is little variation of detection position within the detection range (±0.1mm max.) The different model variations can handle a variety of sensing distances and temperature conditions. E2-L16-N Engineering Data (E2-A07/A08/L16-N) Detection-Position Characteristic (Typical Examples) distance, Y (mm) E2-A E2-A08 E2-L16-N Detection position, X (mm) object: Raw glass (t = 0.7 mm, rounded edge) X Y Overview of Model Variations Type Features Shape, sensing distance (mm)* Model Convergent-reflective 0 to 15 mm, wide-range sensing 0 to 15 E2-L16-N Long-distance sensing to 20 E2-A08 15 to E2-A07E1 E2-A07E2 Heat-resistant up to 00 C 5 to 18 E2-L66 * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). Glass-substrate Mapping These models can reliably detect thin glass-substrate end faces (t = 0.5 mm, beveled edge). Using a large-diameter lens makes it possible to cope with tilting of the glass substrates. Overview of Model Variations Type Features Shape, sensing distance (mm)* Model Convergentreflective E2-A09 Large-diameter lens ensures resistance to tilting Heat-resistant up to 150 C Heat-resistant up to 00 C Engineering Data (E2-A09) Digital light-intensity value Rate of change of digital light-intensity value (%) Digital Light-intensity Value vs Distance (Typical Examples) 00 object: Raw glass 0 (t = 0.5 mm, beveled/rounded edge) Beveled X mm 200 Rounded edge 150 edge distance, X (mm) Angle Characteristics in Left and Right Directions (Typical Example) Angle, θ ( ) 15 to 8 (center: ) 20 to 0 (center: ) object: Raw glass (t = 0.5 mm, rounded edge) mm +θ -θ E2-A09 E2-A09H E2-A09H2 Emission side Reception side * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode). 29

(recommended: 11) Materials: SUS16L and fluororesin IP67 at 85 C 8 to 20 Materials: SUS16L and (recommended: 11) fluororesin IP67 at 70 C * The sensing distances apply for use in combination with the

15 Photoelectric Glass Detection Stable detection of glass in wet process. Non-contact operation simplifies mounting and maintenance. E2-L11FP Wafer Mapping Overview of Model Variations Type Features Shape, sensing distance (mm)* Model Limited-reflective Materials: Heat-resistant PVC and fluororesin IP67 at 60 C 8 to 20 (recommended: 11) Materials: SUS16L and fluororesin IP67 at 85 C 8 to 20 Materials: SUS16L and (recommended: 11) fluororesin IP67 at 70 C * The sensing distances apply for use in combination with the EX-DA@TG-S Unit. E2-L11FP E2-L11FS E2-L12FS Wafers are reliable detected with an ultrafine beam. The optical axis is adjusted before delivery to allow easy installation. E2-A0 Features axis adjusted before delivery so that displacement is typically within 0.1. Direction of rotation E2-A0-1 Overview of Model Variations Type Features Shape, sensing distance (mm)* Model Through-beam Opening angle: 1.5 With mounting flange Opening angle: 5 ultraslim With mounting flange Engineering Data Rate of change of digital light-intensity value (%) Vertical rotation 8-inch Wafer Mapping Characteristic (Typical Examples) Wafer piles can also be detected For For 2 wafers 1 wafer 6.5 mm 20 2-wafer pile Distance moved, X (mm) * The sensing distances apply for use in combination with the EX-DA-S Unit (general-purpose, standard mode) E2-A0 E2-A0-1 E2-A mm E2-A04-1 X Silicon wafer (t = 0.75 mm) 0

16 Ordering Through-beam Units High-resolution mode Type Appearance (mm) *2 distance (mm) M4 Standard mode Standard object (min. detectable object) (mm) *1 Super-high-speed mode Min. bending radius (mm) Note: When used in combination with the EX-DA-S Unit (general-purpose). Features M4 right angle Model E2-T11N Photoelectric M4 M4 screw E2-T11R Standard size (40) ( ): E2- TC200B4 M4 1.2 dia. Min. bending radius of sleeve: dia. (0.005 dia.) -dia. cylinder Flat shape M4 screw, with sleeve E2-T12R E2-T15XR E2-TC200BR E2-TC200B4R -dia. cylinder, sideview E2-T14LR Standard models Flexible (new standard) M R R1 Flat shape, side-view E2-T15YR Flat shape, flat-view E2-T15ZR M screw (small) E2-T21R 2 dia. 2-dia. cylinder (small) E2-T22R 1.5 dia dia. cylinder (small) Flat shape (small) E2-T222R E2-TXR Small size 90 (40) M ( ): E2- TC200F4 0.9 dia. Min. bending radius of sleeve: dia. (0.005 dia.) M screw (small), with sleeve E2-TC200FR E2-TC200F4R 1 dia. 1-dia. cylinder (small), side-view E2-T24R Flat shape (small), side-view E2-TYR Flat shape (small), flat-view E2-TZR *1. The values for the minimum detectable object are representative values that indicate values obtained in standard mode with the sensing distance and sensitivity set to optimum values. *2. Indicates models that allow free cutting. 1

17 Photoelectric Type Appearance (mm) *2 distance (mm) Standard size M (40) ( ): E2- TC200B4 M4 1.2 dia. Min. bending radius of sleeve: 5 High-resolution mode 200 1, Standard mode Standard object (min. detectable object) (mm) *1 1 dia. (0.005 dia.) Super-high-speed mode Min. bending radius (mm) R Note: When used in combination with the EX-DA-S Unit (general-purpose). M4 screw Features -dia. cylinder Flat shape M4 screw, with sleeve Model E2-TC200 E2-T12 E2-T15X E2-TC200B E2-TC200B4 -dia. cylinder, sideview E2-T14L Flat shape, side-view E2-T15Y 15 8 Flat shape, flat-view E2-T15Z Standard models Standard M 180 M M screw (small) E2-TC200A E2-TC200E 2 dia. 2-dia. cylinder (small) E2-T22 Small size 1.5 dia (40) M ( ): E2- TC200F4 0.9 dia. Min. bending radius of sleeve: 5 1 dia dia. (0.005 dia.) R 1.5-dia. cylinder (small) Flat shape (small) M screw (small), with sleeve 1-dia. cylinder (small), side-view E2-T222 E2-TX E2-TC200F E2-TC200F4 E2-T Flat shape (small), side-view E2-TY Flat shape (small) flat-view E2-TZ *1. The values for the minimum detectable object are representative values that indicate values obtained in standard mode with the sensing distance and sensitivity set to optimum values. *2. Indicates models that allow free cutting. 2

18 Photoelectric Type Appearance (mm) *2 distance (mm) Standard object (min. detectable object) (mm) *1 Min. bending radius (mm) Features Model Standard size M dia. (0.005 dia.) M4 screw -dia. cylinder Flat shape E2-T11 E2-T12B E2-T15XB Standard models Break-resistant Small size 15 8 M 2 dia. 1.5 dia dia. (0.005 dia.) B R4 M screw (small) 2-dia. cylinder (small) 1.5-dia. cylinder (small) E2-T21 E2-T221B E2-T22B Flat shape (small) E2-TXB Coating M dia. (0.005 dia.) U R4 M4 screw, fluorine coating E2-T11U M14 20,000 * 20,000 * 4,000 dia. R Large built-in lens, M14 screw E2-T17L M4 4,000 *4, R R1 M4 right angle E2-T11N + E9-F1 Special-beam models Long-distance, high-power M4 4,000 *4 4,000 *4 1,500 4,000 *4, ,000 *4, ,000 *4, dia. (0.1 dia.) R R R1 B R4 M4 screw M4 screw, flexible fiber M4 screw, breakresistant Screw mounting, sideview E2-TC200 + E9-F1 E2-T11R + E9-F1 E2-T11 + E9-F1 E2-T14 M4 50 1,700 1,0 1.4 dia. (0.01 dia.) *1. The values for the minimum detectable object are representative values that indicate values obtained in standard mode with the sensing distance and sensitivity set to optimum values. *2. Indicates models that allow free cutting. *. The optical fiber is m long on each side, so the sensing distance is 20,000 mm. *4. The optical fiber is 2 m long on each side, so the sensing distance is 4,000 mm. R M4 screw -dia. cylinder E2-T11L E2-T12L

19 Photoelectric Type Appearance (mm) *2 distance (mm) Special-beam models Long-distance, high-power Ultracompact, thin-sleeve M4 0 High-resolution mode M dia. 1 dia. 0.5 dia. Sleeve cannot be bent. 0. dia. Sleeve cannot be bent dia. Sleeve cannot be bent Standard mode Standard object (min. detectable object) (mm) *1 (0.1 dia.) 0.9 dia. (0.005 dia.) 0.5 dia. (0.005 dia.) 0. dia. (0.005 dia.) 0.1 dia. (0.005 dia.) 0.1 dia. (0.005 dia.) Super-high-speed mode Min. bending radius (mm) R R R1 B R4 R R R1 R Note: When used in combination with the EX-DA-S Unit (general-purpose). Features M4 screw, side-view M4 screw, side-view, flexible fiber M4 screw, side-view, break-resistant M screw (small) 2-dia. cylinder (small) 1-dia. cylinder, flexible fiber 0.5-dia. sleeve, 0.-dia. opening 0.-dia. sleeve, 0.1-dia. opening 0.22-dia. sleeve, 0.1-dia. opening Model E2-T11L + E9-F2 E2-T11R + E9-F2 E2-T11 + E9-F2 E2-T21L E2-T22L E2-T22R E2-T-S5 E2-T-S5 E2-T4-S5 Fine-beam.5 dia ,500 1,900 1,750 1, dia. (0.1 dia.) 2 dia. (0.1 dia.) R -dia. cylinder.5-dia. cylinder, side-view E2-T22S E2-T24S Area-sensing , ,500 1, ,00 1,000 (0.2 dia.) * *1. The values for the minimum detectable object are representative values that indicate values obtained in standard mode with the sensing distance and sensitivity set to optimum values. *2. Indicates models that allow free cutting. *. This is the value for which detection is possible within the sensing area, with the sensing distance set to 00 mm. (The sensing object is stationary.) R R1 R R R1 R Area width: 11 mm Area width: 11 mm, side-view E2-T16PR E2-T16P E2-T16JR E2-T16J 4

20 Photoelectric Type Appearance (mm) *2 distance (mm) Special-beam models Area-sensing 150 C *5 M 0 M4 2 dia ,700 1,00 2,00 1,800,700 2, , Standard object (min. detectable object) (mm) *1 (0.) * (0.6 dia.) *4 2 dia. (0.1 dia.) 1.5 dia. (0.1 dia.) Min. bending radius (mm) R R1 R R R5 Features Area width: 0 mm Area width: mm, long distance Multi-point detection (4-head) Heat-resistant up to 150 C Heat-resistant up to 150 C, side-view Model E2-T16WR E2-T16W E2-T16 E2-M21 E2-T51 E2-T54 Environment-resistive models Heat-resistant Chemical-resistant 200 C *6 50 C *6 7.2 dia. M4 M4 M4 5 dia. 5 dia. 5 dia. 6 dia. M ,000 *7, ,750 1,00 2,500 4,000 *7, ,800 1, dia. (0.005 dia.) (0.1 dia.) 4 dia. (0.1 dia.) 1.7 dia. (0.1 dia) 1 dia. (0.005 dia.) 4 dia. (0.1 dia.) (0.1 dia.) 4 dia. (0.1 dia.) 1 dia. (0.005 dia.) *1. The values for the minimum detectable object are representative values that indicate values obtained in standard mode with the sensing distance and sensitivity set to optimum values. *2. Indicates models that allow free cutting. *. This is the value for which detection is possible within the sensing area, with the sensing distance set to 00 mm. (The sensing object is stationary.) *4. This is the value for which detection is possible within the sensing area, with the sensing distance set to give a digital value of 1,000. (The sensing object is stationary.) *5. For continuous operation, use the products within a temperature range of 40 to 10 C. *6. The maximum temperature that can be withstood varies with the location. Refer to dimensions diagrams for details. *7. The optical fiber is 2 m long on each side, so the sensing distance is 4,000 mm. R R R4 R40 R Heat-resistant up to 200 C Heat-resistant up to 200 C, side-view Heat-resistant up to 200 C, long distance Heat-resistant up to 200 C, L-shaped, long distance Heat-resistant up to 50 C Fluororesin cover, round head Fluororesin cover, long distance Fluororesin cover, side-view Fluororesin cover, heat-resistant up to 150 C *5 Fluororesin cover, heat-resistant up to 200 C *6 E2-T81R-S E2-T61-S + E9-F2 E2-T61-S + E9-F1 E2-T84S-S E2-T61-S E2-T11F E2-T12F E2-T14F E2-T51F E2-T81F-S 5

21 Photoelectric Type Appearance (mm) distance (mm) Environment-resistive models Vacuum-resistant 50 5 High-resolution mode ,50 1,000 Standard mode Standard object (min. detectable object) (mm) * 1.2 dia. (0.01 dia.) 4 dia. (0.1 dia.) 1.2 dia. (0.01 dia.) 4 dia. (0.1 dia.) 2 dia. (0.1 dia.) Super-high-speed mode Min. bending radius (mm) Features * The values for the minimum detectable object are representative values that indicate values obtained in standard mode with the sensing distance and sensitivity set to optimum values. R0 R Note: When used in combination with the EX-DA-S Unit (general-purpose). M4 screw, heatresistant up to 120 C M4 screw, heatresistant up to 120 C, long distance L-shaped, heatresistant up to 120 C L-shaped, heatresistant up to 120 C, long distance L-shaped, heatresistant up to 200 C, long distance Model E2-T51V 1M E2-T51V 1M + E9-F1V E2-T54V 1M E2-T54V 1M + E9-F1V E2-T84SV 1M Flanges Appearance (mm) Type Model 4-channel flange E2-VF4 Lens Units Appearance (mm) Model Quantity Remarks E9-F1V 2 Long-distance Lens Unit Can be used for the E2-T51V and the E2-T54V. 1-channel flange E2-VF1 Units for Atmospheric-pressure Side Appearance (mm)* Type Model Mounting Brackets Appearance (mm) Model Quantity Remarks E9-L54V 2 Can be used for the E2-T54V. -Flange Connection E2-TV 2M * Indicates models that allow free cutting. 6

22 Photoelectric Units with Reflective Type Appearance (mm) * distance (mm) *1 M6 High-resolution mode Standard mode (Min. detectable object) (mm) *2 Super-high-speed mode Min. bending radius (mm) Note: When used in combination with the EX-DA-S Unit (general-purpose). Features M6 right angle Model E2-D11N M6 M6 screw E2-D11R dia. cylinder E2-D12R Standard size 15 Sleeve cannot M6 be bent. dia. Flat shape M6 screw, with sleeve E2-D15XR E2-DC200BR E2-DC200B4R 6 dia dia. cylinder, side-view E2-D14LR Standard models Flexible (new standard) M (0.005 dia.) R R1 Flat shape, side-view E2-D15YR Flat shape, flat-view E2-D15ZR M4 screw (small) E2-D211R M screw (small) E2-D21R M dia. cylinder (small) E2-D22R 12 8 Flat panel (small) E2-DXR Small size Min. bending radius of sleeve: 5 M 1.2 dia. M screw (small), with sleeve E2-DC200FR E2-DC200F4R 2 dia dia. cylinder (small), side-view E2-D24R Flat shape (small), side-view Flat shape (small), flat-view E2-DYR E2-DZR *1. The sensing distances are for white paper. *2. The values for the minimum detectable object are representative values that indicate values obtained in standard mode with the sensing distance and sensitivity set to optimum values. *. Indicates models that allow free cutting. 7

23 Photoelectric Type Appearance (mm) * distance (mm) *1 Standard size ( ): E2- DC200B4 Sleeve cannot be bent. M (40) M6 dia High-resolution mode 20 6 dia Standard mode (Min. detectable object) (mm) *2 Super-high-speed mode Min. bending radius (mm) R Note: When used in combination with the EX-DA-S Unit (general-purpose). M6 screw Features -dia. cylinder Flat shape M6 screw, with sleeve 6-dia. cylinder, side-view Model E2-DC200 E2-D12 E2-D15X E2-DC200B E2-DC200B4 E2-D14L Standard models Standard M (0.005 dia.) Flat shape, side-view E2-D15Y Flat shape, flat-view E2-D15Z M4 screw (small) E2-D211 M M screw (small) E2-DC200E dia. cylinder (small) E2-D22 Small size ( ): E2- DC200F4 Min. bending radius of sleeve: (40) M 1.2 dia. R Flat shape (small) M screw (small), with sleeve E2-DX E2-DC200F E2-DC200F4 2 dia dia. cylinder (small), side-view E2-D Flat shape (small), side-view Flat shape (small), flat-view E2-DY E2-DZ *1. The sensing distances are for white paper. *2. The values for the minimum detectable object are representative values that indicate values obtained in standard mode with the sensing distance and sensitivity set to optimum values. *. Indicates models that allow free cutting. 8

24 Photoelectric Type Appearance (mm) * distance (mm) *1 Standard size 15 M (Min. detectable object) (mm) *2 Min. bending radius (mm) M6 screw Flat shape Features E2-D11 Model E2-D15XB Standard models Break-resistant Small size M M dia. (0.005 dia.) B R4 M4 screw (small) E2-D21B -dia. cylinder (small) E2-D221B M screw (small) 1.5-dia. cylinder (small) E2-D21 E2-D22B Flat shape (small) E2-DXB Coating M (0.005 dia.) U R4 M6 screw, fluorine coating E2-D11U Special-beam models Long-distance, high-power Ultracompact, thin-sleeve 17.5 M6 1 M dia. Sleeve cannot be bent. 2 dia. 0.5 dia. Sleeve cannot be bent to to 1, to 700 *1. The sensing distances are for white paper. *2. The values for the minimum detectable object are representative values that indicate values obtained in standard mode with the sensing distance and sensitivity set to optimum values. *. Indicates models that allow free cutting. --- (0.005 dia.) B R4 Large built-in lens, screw mounting E2-D16 R M6 screw E2-D11L R R4 M4 screw -dia. cylinder 0.8-dia. sleeve 0.5-dia. sleeve E2-D21L E2-D22L E2-D E2-D1 9

25 Photoelectric Type Appearance (mm) * distance (mm) *1 M6 M M High-resolution mode Standard mode (Min. detectable object) (mm) *2 Super-high-speed mode Min. bending radius (mm) R R4 Note: When used in combination with the EX-DA-S Unit (general-purpose). Features M6 right angle M right angle M6 screw -dia. cylinder Model E2-C11N E2-C1N E2-CC200R E2-CC200 E2-D2L Special-beam models Coaxial, small-spot M dia. Spot diameter of 6 to 15 mm at 0.1 to 0.6 mm Spot diameter of 0.5 to 1 mm at 6 to 15 mm Spot diameter of 0.1 mm at 7 mm Spot diameter of 0.5 mm at 7 mm (0.005 dia.) R M screw (small) 2-dia. cylinder (small) Small spot (variable) Small spot E2-C1 E2-D2 E2-C42 + E9-FA E2-D2 + E9-FA E2-C41 + E9-FA-5 E2-C1 + E9-FA-5 Spot diameter of 0.2 mm at 17 mm Spot diameter of 0.5 mm at 17 mm Long distance, small spot E2-C41 + E9-FB E2-C1 + E9-FB 4-dia. spot Spot diameter of 4 mm max. at 0 to 20 mm Long-distance sensing, parallel light E2-C1 + E9-FC Area-sensing Retro-reflective M6 E9-R Reflector E9-R1 Reflector to 0 to 0 to to 1, to 1, to 1,500 (0.005 dia.) *1. The sensing distances are for white paper. *2. The values for the minimum detectable object are representative values that indicate values obtained in standard mode with the sensing distance and sensitivity set to optimum values. *. Indicates models that allow free cutting. B R4 (0.1 dia.) R M6 screw (0.2 dia.) R Beam width: 11 mm Screw mounting, long distance E2-D6P1 E2-R21 + E9-R (Attached) E2-R16 + E9-R1 (Attached) 40

26 Photoelectric Type Appearance (mm) * distance (mm) *1... (Min. detectable object) (mm) *2 Min. bending radius (mm) R Features Small level differences, high power, side-view Small level differences, top-view Model E2-L E2-LA Special-beam models Convergent-reflective 0 to 4 0 to 4 0 to 4 2 to 6 (center: 4) 2 to 6 (center: 4) 2 to 6 (center: 4) 5.4 to 9 (center: 7.2) 5.4 to 9 (center: 7.2) 5.4 to 9 (center: 7.2) 4 to 4 to 4 to (0.005 dia.) R Ultracompact, flat-view E2-L24S Heat resistant up to 5 C *4 flat-view Heat resistant up to 5 C *4 top-view Heat resistant up to 200 C, flat-view E2-L24L E2-LL E2-L86 1 to 5 1 to 5 1 to 5 0 to 15 0 to 15 0 to 12 (0 to 12) Soda glass with reflection factor of 7% R Heat resistant up to 00 C Ideal for checking stocks of glass substrates E2-L64 E2-A Environment-resistive models Heat-resistant Chemical-resistant 150 C *5 200 C *6 50 C *6 M6 72 M M6 400 C M4 1. dia. *6 Min. bending radius of sleeve: 7 dia. 6 dia (0.005 dia.) *1. The sensing distances are for white paper. *2. The values for the minimum detectable object are representative values that indicate values obtained in standard mode with the sensing distance and sensitivity set to optimum values. *. Indicates models that allow free cutting. *4. For continuous operation, use the products within a temperature range of 40 to 90 C. *5. For continuous operation, use the products within a temperature range of 40 to 10 C. *6. The maximum temperature that can be withstood varies with the location. Refer to dimensions diagrams for details. R5 R R (0.005 dia.) R40 Heat resistant up to 150 C Heat resistant up to 200 C Heat resistant up to 50 C Heat resistant up to 400 C, with sleeve Fluororesin cover, long distance Fluororesin cover, side-view E2-D51 E2-D81R-S E2-D81R E2-D61-S E2-D61 E2-D7-S E2-D7 E2-D12F E2-D14F 41

27 Photoelectric -specific Units Type Appearance (mm) *2 distance (mm) Label-detection High-resolution mode 4,500, Standard mode Standard object (min. detectable object) (mm) *1 4 dia. (0.1 dia.) Applicable tube: Transparent tube with a diameter in the range 8 to mm and a recommended wall thickness of 1 mm Applicable tube: Transparent tube (no restriction on diameter) Super-high-speed mode Min. bending radius (mm) R Note: When used in combination with the EX-DA-S Unit (general-purpose). Features Slot sensor (no adjustment of optical axis required) Screw mounting, side-view Model E2-G14 E2-T14 R Compact E2-LT No restriction on tube diameter, resistant to bubbles and drops of water E2-D6T Liquid-level detection Applicable tube: Transparent tube with a diameter of.2, 6.4, or 9.5 mm and a recommended wall thickness of 1 mm Applicable tube: Transparent tube with a diameter in the range 6 to 1 mm and a recommended wall thickness of 1 mm R4 Light ON when fluid is present, resistant to bubbles and drops of water Light ON when fluid is not present, resistant to bubbles and drops of water E2-A01 E2-A02 -specific models Glass-substrate-alignment Liquid-contact models 0 to 15 0 to 15 0 to 15 (0 to 15) to 20 to to 15 to 5 to 18 5 to 18 5 to 15 Soda glass with reflection factor of 7% R40 R Heat resistant up to 200 C, Fluororesin cover Variation of detection position within the detection range: 0.1 mm Heat resistant up to 00 C *4, *5 E2-D82F1 E2-D82F2 E2-L16-N E2-A08 E2-A07E1 E2-A07E2 E2-L66 to 20 to 20 to 20 Heat resistant up to 00 C E2-A08H2 Glass-substrate-mapping 15 to 8 (center: ) 15 to 8 (center: ) 20 to 0 (center: ) 20 to 0 (center: ) Edge of soda glass with reflection factor of 7% (t = 0.5 mm, rounded edge) R Resistant to tilting E2-A09 R5 R Heat resistant up to 150 C * Heat resistant up to 00 C *4, *5 E2-A09H E2-A09H2 *1. The values for the minimum detectable object are representative values that indicate values obtained in standard mode with the sensing distance and sensitivity set to optimum values. *2. Indicates models that allow free cutting. *. For continuous operation, use the products within a temperature range of 40 to 10 C. *4. The maximum temperature that can be withstood varies with the location. Refer to dimensions diagrams for details. *5. These values are based on the assumption that there are no repeated sudden changes in temperature. 42

28 Photoelectric Type Appearance (mm) *2 distance (mm) -specific models Glass detection Wafer-mapping 8 to 20 from lens tip (11) * 19 to 1 from center of mounting hole A (22) 8 to 20 from lens tip (11) * 2 to 44 from center of mounting hole A (5) 0 1, dia. 1,750 1, dia. 2 dia Standard object (min. detectable object) (mm) *1 Glass (t=0.7 mm) 2 dia. (0.1 dia.) 1.2 dia. (0.1 dia.) Min. bending radius (mm) Features *1. The values for the minimum detectable object are representative values that indicate values obtained in standard mode with the sensing distance and sensitivity set to optimum values. *2. Indicates models that allow free cutting. *. Recommended sensing distance is shown in bracket. R40 R R1 R Materials: Heatresistant PVC and fluororesin IP67 at 60 C Materials: SUS16L and fluororesin IP67 at 85 C Materials: SUS16L and fluororesin IP67 at 70 C Opening angle: 1.5 ; optical axis adjusted before delivery Opening angle: 1.5 ; with mounting flange; optical axis adjusted before delivery Long distance; opening angle: 6 Ultraslim (t = 2 mm); opening angle: ; optical axis adjusted before delivery Ultraslim (t = 2 mm); opening angle: ; with mounting flange; optical axis adjusted before delivery Model E2-L11FP E2-L11FS E2-L12FS E2-A0 E2-A0-1 E2-T24S E2-A04 E2-A04-1 4

29 Photoelectric Accessories Lens Units Type Appearance Through-beam Lens Units Side-view Units Long-distance Lens Units Applicable Units E2-T11L E2-TC200 E2-T11R E2-T11 E2-T11U distance (mm) Highresolution mode *2 4,000 *2 4,000 *2 4,000 *2 4,000 *2 4,000 Standard mode Superhighspeed, *2 4,000 1,500, ,600 90, E2-T81R-S 2,650 2,0 520 E2-T61-S *2 4,000, E2-T11L E2-TC E2-T11R E2-T E2-T11U E2-T81R-S E2-T61-S Note: When used in combination with the EX-DA-S Unit (general-purpose). Standard object (min. detectable object) (mm) *1 4 dia. (0.1 dia.) (0.1 dia.) Features Long-distance sensing; opening angle: 5 to 40 (heat resistant up to 200 C) Side-view, spacesaving (heat resistant up to 200 C) Model E9-F1 E9-F2 Reflective Lens Units Reflection Units Small-spot Lens Units E2-T11L E2-TC200 E2-T11R E2-T11 E2-T11U E2-T81R-S E2-T61-S E2-C42 E2-D2 E2-C41 E2-C1 E2-C41 E2-C1 E2-C1 E2-C Spot diameter of 0.1 to 0.6 mm at 6 to 15 mm Spot diameter of 0.5 to 1 mm at 6 to 15 mm Spot diameter of 0.1 mm at 7 mm Spot diameter of 0.5 mm at 7 mm Spot diameter of 0.2 mm at 17 mm Spot diameter of 0.5 mm at 17 mm Spot diameter of 4 mm max. at 0 to 20 mm Long distance reflection (heat resistant up to 200 C) Small spot (variable) Small spot Long distance, small spot Long-distance sensing, parallel light E9-F E9-FA E9-FA-5 E9-FB E9-FC *1. The values for the minimum detectable object are representative values that indicate values obtained in standard mode with the sensing distance and sensitivity set to optimum values. *2. The optical fiber is 2 m long on each side, so the sensing distance is 4,000 mm. 44

30 Photoelectric Protective Spiral Tubes Appearance Applicable Units Tube length Model M-screw models 500 mm E9-F2A5 E2-DC200E 1 m E9-F2A E2-C1 M-screw models E2-T21@ 500 mm E9-F2B5 (Except the E2-T21R) E2-TC200E 1 m E9-F2B E2-TC200F@ protection M4-screw models E2-T11@ 500 mm E9-F2C5 E2-TC200 E2-TC200B@ 1 m E9-F2C E2-T51 M6-screw models E2-D11@ 500 mm E9-F2D5 E2-DC200 E2-DC200B E2-CC200@ 1 m E9-F2D E2-D51 Note: Before using a Protective Spiral Tube, remove the protective tube that protects the area between the head and the optical fiber provided with some models. Accessories Appearance Name Applicable Units Remarks Model Used to cut the fiber Cutter Units that allow free cutting Provided with applicable Units. E9-F4 2 per set Attachments for inserting thin fibers into Units Thin-fiber Attachments Units that allow free cutting and have a 1.0-dia. sheath Provided with applicable Units. E9-F9 Used to extend fibers Units that allow free cutting and have a 2.2-dia. sheath --- E9-F Easy-to-use, one-touch relay connectors Connectors Units that allow free cutting E9-F1: Used for Units with a 2.2-dia. sheath. E9-F14: Used for Units with a 1.0-dia. sheath. E9-F15: Used for Units with a sheath diameter between 1.0 and 2.2 mm. E9-F1 E9-F14 E9-F15 Used to bends in sleeves Sleeve Bender E2-TC200B(4) E2-TC200F(4) E2-DC200F(4) --- E9-F11 Used to mount the.5 dia. fiber Mounting Bracket E2-T24S E2-A0 Provided with applicable Units. E9-L8 45

31 Photoelectric Ratings and ations Standard Models E2-D11 Type Ambient operating temperature Ambient humidity material (coating) Min. bending radius (mm) Clamping torque (N m) Plastic (PVC coating) R E2-D11N Plastic (PVC coating) R E2-D11R Plastic (PVC coating) R E2-D11U Plastic (fluororesin coating) R E2-D12 Plastic (polyethylene coating) R E2-D12R Plastic (PVC coating) R E2-D14L Plastic (polyethylene coating) R E2-D14LR Plastic (PVC coating) R E2-D15X Plastic (polyethylene coating) R E2-D15XB Plastic (PVC coating) R E2-D15XR Plastic (PVC coating) R E2-D15Y Plastic (polyethylene coating) R E2-D15YR Plastic (PVC coating) R E2-D15Z Plastic (polyethylene coating) R E2-D15ZR Plastic (PVC coating) R E2-D21 Plastic (PVC coating) R E2-D211 Plastic (polyethylene coating) R E2-D211R Plastic (polyethylene coating) R E2-D21B Plastic (PVC coating) R E2-D21R Plastic (polyethylene coating) R E2-D22 Plastic (polyethylene coating) R E2-D221B Plastic (PVC coating) R E2-D22B Plastic (PVC coating) R E2-D22R Plastic (polyethylene coating) R E2-D24 Plastic (polyethylene coating) R E2-D24R -40 to 70 C 5 to 85%RH Plastic (polyethylene coating) R E2-DX Plastic (polyethylene coating) R E2-DXB Plastic (PVC coating) R E2-DXR Plastic (polyethylene coating) R E2-DY Plastic (polyethylene coating) R E2-DYR Plastic (polyethylene coating) R E2-DZ Plastic (polyethylene coating) R E2-DZR Plastic (polyethylene coating) R E2-DC200 Plastic (polyethylene coating) R E2-DC200B(B4) Plastic (polyethylene coating) R E2-DC200BR(B4R) Plastic (PVC coating) R E2-DC200E Plastic (polyethylene coating) R E2-DC200F(F4) Plastic (polyethylene coating) R E2-DC200FR(F4R) Plastic (polyethylene coating) R E2-T11 Plastic (PVC coating) R E2-T11N Plastic (PVC coating) R E2-T11R Plastic (PVC coating) R E2-T11U Plastic (fluororesin coating) R E2-T12 Plastic (polyethylene coating) R E2-T12B Plastic (PVC coating) R E2-T12R Plastic (PVC coating) R E2-T14L Plastic (polyethylene coating) R E2-T14LR Plastic (PVC coating) R E2-T15X Plastic (polyethylene coating) R E2-T15XB Plastic (PVC coating) R E2-T15XR Plastic (PVC coating) R Pulling tension (N) Degree of protection (IEC standard) IP67 46

32 Photoelectric E2-T15Y Type Ambient operating temperature Ambient humidity material (coating) Min. bending radius (mm) Clamping torque (N m) Plastic (polyethylene coating) R E2-T15YR Plastic (PVC coating) R E2-T15Z Plastic (polyethylene coating) R E2-T15ZR Plastic (PVC coating) R E2-T21 Plastic (PVC coating) R E2-T21R Plastic (polyethylene coating) R E2-T22 Plastic (polyethylene coating) R E2-T221B Plastic (PVC coating) R E2-T222 Plastic (polyethylene coating) R E2-T222R Plastic (polyethylene coating) R E2-T22B Plastic (PVC coating) R E2-T22R Plastic (polyethylene coating) R E2-T24 Plastic (polyethylene coating) R E2-T24R Plastic (polyethylene coating) R to 70 C 5 to 85%RH E2-TX Plastic (polyethylene coating) R E2-TXB Plastic (PVC coating) R E2-TXR Plastic (polyethylene coating) R E2-TY Plastic (polyethylene coating) R E2-TYR Plastic (polyethylene coating) R E2-TZ Plastic (polyethylene coating) R E2-TZR Plastic (polyethylene coating) R E2-TC200 Plastic (polyethylene coating) R E2-TC200A Plastic (polyethylene coating) R E2-TC200B(B4) Plastic (polyethylene coating) R E2-TC200BR(B4R) Plastic (PVC coating) R E2-TC200E Plastic (polyethylene coating) R E2-TC200F(F4) Plastic (polyethylene coating) R E2-TC200FR(F4R) Plastic (polyethylene coating) R Pulling tension (N) Degree of protection (IEC standard) IP67 47

33 Photoelectric Special Beam Models Ambient Type operating temperature E2-A -40 to 70 C Ambient humidity material (coating) Min. bending radius (mm) Clamping torque (N m) Pulling tension (N) Plastic (polyethylene coating) R IP0 E2-C11N -40 to 70 C Plastic (combination of PVC and polyethylene sheaths) R IP67 E2-C1-40 to 70 C Plastic (polyethylene coating) R IP67 E2-C1N -40 to 70 C Plastic (combination of PVC and polyethylene sheaths) R IP67 E2-C41-40 to 70 C Plastic (polyethylene coating) R IP67 E2-C42-40 to 70 C Plastic (polyethylene coating) R IP67 E2-CC to 70 C Plastic (polyethylene coating) R IP67 E2-CC200R -40 to 70 C Plastic (polyethylene coating) R IP67 E2-D11L -40 to 70 C Plastic (polyethylene coating) R IP67 E2-D16-40 to 70 C Plastic (PVC coating) R IP40 E2-D21L -40 to 70 C Plastic (polyethylene coating) R IP67 E2-D22L -40 to 70 C Plastic (polyethylene coating) R IP67 E2-D2-40 to 70 C Plastic (polyethylene coating) R IP67 E2-D2L -40 to 70 C Plastic (polyethylene coating) R IP67 E2-D -40 to 70 C Plastic (polyethylene coating) R IP67 E2-D1-40 to 70 C Plastic (polyethylene coating) R IP67 E2-D6P1-40 to 70 C Plastic (polyethylene coating) R IP50 E2-L24L -40 to 5 C Plastic (polyethylene coating) R IP50 E2-L24S -40 to 70 C Plastic (polyethylene coating) R IP40 E2-L -40 to 70 C Plastic (polyethylene coating) R IP50 E2-LA -40 to 70 C Plastic (polyethylene coating) R IP50 E2-LL -40 to 5 C Plastic (polyethylene coating) R IP50 E2-L64-40 to 00 C 5 to 85%RH Glass (SUS spiral coating) R IP50 E2-L86-40 to 200 C Glass (SUS spiral coating) R IP40 E2-M21-40 to 70 C Plastic (PVC coating) R 0.49, 0.78 * 9.8 IP50 E2-R16 - to 55 C Plastic (polyethylene coating) R IP66 E2-R21-40 to 70 C Plastic (polyethylene coating) R IP67 E2-T11L -40 to 70 C Plastic (polyethylene coating) R IP67 E2-T12L -40 to 70 C Plastic (polyethylene coating) R IP67 E2-T14-40 to 70 C Plastic (polyethylene coating) R IP67 E2-T16-40 to 70 C Plastic (polyethylene coating) R IP67 E2-T16J -40 to 70 C Plastic (PVC coating) R IP50 E2-T16JR -40 to 70 C Plastic (PVC coating) R IP50 E2-T16P -40 to 70 C Plastic (PVC coating) R IP50 E2-T16PR -40 to 70 C Plastic (PVC coating) R IP50 E2-T16W - to 55 C Plastic (PVC coating) R IP50 E2-T16WR - to 55 C Plastic (PVC coating) R IP50 E2-T17L -40 to 70 C Plastic (polyethylene coating) R IP67 E2-T21L -40 to 70 C Plastic (polyethylene coating) R IP67 E2-T22R -40 to 70 C Plastic (polyethylene coating) R IP67 E2-T22L -40 to 70 C Plastic (polyethylene coating) R IP67 E2-T22S -40 to 70 C Plastic (PVC coating) R IP50 E2-T24S -40 to 70 C Plastic (PVC coating) R IP50 E2-T-S5-40 to 70 C Plastic (polyethylene coating) R IP67 E2-T4-S5-40 to 70 C Plastic (polyethylene coating) R IP67 E2-T-S5-40 to 70 C Plastic (PVC coating) R IP67 Degree of protection (IEC standard) * Clamping torque differs for head and body. Refer to dimensions on page 54 for details. 48

34 Photoelectric Environment-resistive Models Ambient Type operating temperature E2-D12F -40 to 70 C Ambient humidity material (coating) Min. bending radius (mm) Clamping torque (N m) Pulling tension (N) Plastic (fluororesin coating) R IP67 E2-D14F -40 to 70 C Plastic (fluororesin coating) R IP67 E2-D51-40 to 150 C Plastic (fluororesin coating) R IP67 E2-D61-60 to 50 C Glass (SUS spiral coating) R IP67 E2-D61-S -60 to 50 C Glass (SUS spiral coating) R IP67 E2-D7-40 to 400 C Glass (SUS spiral coating) R IP67 E2-D7-S -40 to 400 C Glass (SUS spiral coating) R IP67 E2-D81R -40 to 200 C Glass (fluororesin coating) R IP67 E2-D81R-S -40 to 200 C Glass (fluororesin coating) R IP67 E2-T11F -40 to 70 C Plastic (fluororesin coating) R IP67 E2-T12F -40 to 70 C Plastic (fluororesin coating) R IP67 5 to 85%RH E2-T14F -40 to 70 C Plastic (fluororesin coating) R IP67 E2-T51-40 to 150 C Plastic (fluororesin coating) R IP67 E2-T51F -40 to 150 C Plastic (fluororesin coating) R IP67 E2-T51V - to 120 C Glass (fluororesin coating) R E2-T54-40 to 150 C Plastic (fluororesin coating) R IP67 E2-T54V - to 120 C Glass (fluororesin coating) R E2-T61-S -60 to 50 C Glass (SUS spiral coating) R IP67 E2-T81F-S -40 to 200 C Glass (fluororesin coating) R IP67 E2-T81R-S -40 to 200 C Glass (fluororesin coating) R IP67 E2-T84S-S -40 to 200 C Glass (fluororesin coating) R IP67 E2-T84SV - to 200 C Glass (SUS spiral coating) R Degree of protection (IEC standard) -specific Models Ambient Type operating temperature E2-A01-40 to 70 C Ambient humidity material (coating) Min. bending radius (mm) Clamping torque (N m) Pulling tension (N) Plastic (fluororesin coating) R4-9.8 IP50 E2-A02-40 to 70 C Plastic (fluororesin coating) R4-9.8 IP50 E2-A0-40 to 70 C Plastic (polyethylene coating) R IP50 E2-A to 70 C Plastic (polyethylene coating) R IP50 E2-A04-40 to 70 C Plastic (polyethylene coating) R IP50 E2-A to 70 C Plastic (polyethylene coating) R IP50 E2-A07E1(E2) -40 to 70 C Plastic (polyethylene coating) R IP40 E2-A08-40 to 70 C Plastic (polyethylene coating) R IP40 E2-A08H2-40 to 00 C Glass (SUS spiral coating) R IP0 E2-A09-40 to 70 C Plastic (polyethylene coating) R IP40 E2-A09H -40 to 150 C Plastic (fluororesin coating) R IP40 E2-A09H2-40 to 00 C Glass (SUS spiral coating) R IP40 E2-D6T -40 to 70 C 5 to 85%RH Plastic (polyethylene coating) R IP50 E2-D82F1-40 to 200 C tip: Glass + Fluororesin coating Connecting end: Plastic (fluororesin coating) R IP68 E2-D82F2-40 to 200 C (Fluororesin coating) R IP68 E2-G14-40 to 70 C Plastic (polyethylene coating) R IP67 E2-L11FP - (PVC and fluororesin coating) R IP67 E2-L11FS - (SUS16L and fluororesin coating) R IP67 E2-L12FS - (SUS16L and fluororesin coating) R IP67 E2-L16-N -40 to 70 C Plastic (polyethylene coating) R IP40 E2-LT -40 to 70 C Plastic (polyethylene coating) R IP50 E2-L66 0 to 00 C Glass (SUS spiral coating) R IP40 E2-T14-40 to 70 C Plastic (polyethylene coating) R IP67 Degree of protection (IEC standard) 49

35 Photoelectric Dimensions Through-beam Units (Unit: mm) Standard/Flexible Models Indicates models that allow free cutting. E2-T11N 8.4 dia. 5.5 head (brass/nickel plating) (45) M dia. (sensing surface) M E2-TC200E 5.5 E2-T22 E2-T22R 0.5 dia. 7 7 Model display tube (standard length) Two hexagonal nuts Two toothed washers head: M 0.5* fiber: 1 dia. fiber, 2.2 dia. Four, M4 nuts and washers provided. 1.8 Attachment (E9-F9) 11 *Material: Brass/nickel plating E2-TC200 E2-T11R 1 dia. M E2-TC200A E2-T21R 5.5 E2-T12 E2-T12R Two hexagonal nuts Two toothed washers head: M4 0.7* dia. * fiber: 2.2 dia. *Material: Brass/nickel plating Two hexagonal nuts Two toothed washers head: M 0.5 *2 fiber: 2.2 dia. *1. E2-T21R: 0.5 dia. *2. Material: Brass/nickel plating 0.5 dia. 2 dia. head* Heat-shrinkable tube 1.4 dia. fiber: 1 dia. 1 dia. 2.4 dia. head: * fiber: 2.2 dia Attachment (E9-F9) 22 *Material: Stainless steel (SUS0) 11 (14) *Material: Brass/nickel plating E2-T222 E2-T222R E2-T15X E2-T15XR head* 0.5 dia. fiber: 1 dia. head* 15 surface 1 dia. fiber: Two, 2.2 dia. 1.5 dia. Attachment (E9-F9) *Material: Brass/nickel plating Two, 2.2-dia. mounting holes with 4.4-dia. countersinks on both sides *Material: Aluminum E2-TX E2-TXR E2-TC200B(B4) E2-TC200BR(B4R) surface: 0.5 dia head* fiber: 1 dia. 1 dia. 1.2 dia. max. Stainlesssteel tube Two toothed washers Two hexagonal nuts (SUS04) head: M4 0.7 (coarse thread) *2 fiber: 2.2 dia Two, 2.2-dia. mounting holes with 4.4-dia. countersinks on both sides E2-TC200F(F4) E2-TC200FR(F4R) 0.5 dia dia. max. Stainlesssteel tube (SUS04) (40) *1 Two hexagonal nuts Two toothed washers head: M 0.5 *2 fiber: 1 dia. Attachment (E9-F9) *Material: Aluminum Attachment (E9-F9) *1. ( ): E2-TC200F4 *2. Material: Brass/nickel plating 7.2 E2-T14L E2-T14LR (40) *1 1.5 surface head: * 45 *1. ( ): E2-TC200B4 *2. Material: Brass/nickel plating 12 Heat-shrinkable tube fiber: 2.2 dia. *Material: Stainless steel (SUS04) 50

36 Photoelectric E2-T24 E2-T24R Attachment (E9-F9) Stainless-steel tube: 1 dia. head: Heat-shrinkable tube 2 dia.* 1.4 dia. fiber: 1 dia E2-TY E2-TYR surface *Material: Stainless steel (SUS04) head* Two, 2.2-dia. mounting holes with 4.4-dia. countersinks on both sides fiber: 1 dia. Attachment (E9-F9) *Material: Aluminum E2-T15Y E2-T15YR surface E2-T15Z E2-T15ZR head* Two, 2.2-dia. mounting holes with 4.4-dia. countersinks on both sides surface head* Two, 2.2-dia. mounting holes with 4.4-dia. countersinks on both sides fiber: 2.2 dia. *Material: Aluminum fiber: 2.2. dia. *Material: Aluminum E2-TZ E2-TZR 2 1 surface 12 head* fiber: 1 dia Two, 2.2-dia. mounting holes with 4.4-dia. countersinks on both sides Attachment (E9-F9) *Material: Aluminum 51

37 Photoelectric Break-resistant/Coated Models E2-T11 E2-T11U Sixteen, dia. M head: Two hexagonal nuts M4 0.7* Two toothed washers Protective tube fiber: 2.2 dia. E2-T21 head: Two hexagonal nuts M 0.5* Two toothed washers fiber: Four, 0. dia. Protective tube 1 dia..2 7 E2-T12B (14) *Material: Brass/nickel plating Sixteen, dia. 2.4 dia. head: * fiber: 2.2 dia. 11 (14) *Material: Brass/nickel plating 5.5 E2-T221B Four, 0. dia dia. head* Heat-shrinkable tube 1.4 dia. fiber: 1 dia. Attachment (E9-F9) *Material: Brass/nickel plating Attachment (E9-F9) 22 *Material: Stainless steel (SUS0) E2-T22B Four, 0. dia. head* fiber: 1 dia. 1.5 dia. Attachment (E9-F9) *Material: Brass/nickel plating E2-T15XB E2-TXB head* surface: 15 Sixteen, dia. fiber: 2.2 dia. surface: Four, 0. dia head* fiber: 1 dia Two, 2.2-dia. mounting holes with 4.4-dia. countersinks on both sides *Material: Aluminum Two, 2.2-dia. mounting holes with 4.4-dia. countersinks on both sides Attachment (E9-F9) *Material: Aluminum 52

38 Photoelectric Long-distance/High-power Models Indicates models that allow free cutting. E2-T17L 19 E2-T11L head: M14 1* Lens: dia. (PMMA) 1.4 dia. M Two hexagonal nuts 42 Two hexagonal nuts Two toothed washers head: M4 0.7*,000 fiber: 2.2. dia. *Material: ABS fiber: 2.2. dia (14) *Material: Brass/nickel plating E2-T14 E2-T12L R.5 axis Two,.2 dia. 1.4 dia Lens (PMMA) 4.4 dia Heat-resistant ABS Nitrile rubber ± fiber: 2.2 dia. 2.4 dia. head: * fiber: 2.2. dia. 11 (14) *Material: Brass/nickel plating E2-T21L 0.9 dia. Two hexagonal nuts Two toothed washers head: M 0.5* fiber: 1 dia. E2-T22L head: 2 dia.* fiber: 0.9 dia. 1.8 dia. Heat-shrinkable 1 dia. tube 5.5 (1.7) Attachment (E9-F9) *Material: Brass/nickel plating (2) Attachment (E9-F9) 22 *Material: Stainless steel Ultracompact/Thin-sleeve Models E2-T22R E2-T-S5 0.5 dia. fiber: 1 dia. (0.5) 0. dia , fiber: 1 dia. 1 dia. head* Attachment (E9-F9) *Material: Stainless steel 0.5 dia. Heat-shrinkable tube head* Attachment (E9-F9) *Material: Stainless steel E2-T-S5 20 1, dia fiber: 1 dia. E2-T4-S5 20 1, dia fiber: 1 dia. 0. dia. Heat-shrinkable tube head* Note: The Attachment is attached with adhesive and cannot be removed. Attachment (E9-F9) *Material: Stainless steel 0.22 dia. Heat-shrinkable tube head* Note: The Attachment is attached with adhesive and cannot be removed. Attachment (E9-F9) *Material: Stainless steel 5

39 Photoelectric Fine-beam (Narrow Vision Field) Models E2-T22S 1.7 dia. 15 Area-sensing Models E2-T16W E2-T16WR head* 18.5 axis 5 surface ( 0) fiber: 2.2 dia. *Material: Brass/nickel plating E2-T24S dia E2-M21 head: M 0.5 * Two hexagonal nuts Two toothed washers Silicon tube * dia. surface head* fiber: 2.2 dia. Mounting bracket (provided as accessory) *Material: Brass/nickel plating *1. One set of silicon tubes is black and the other set is gray. Use this Four, 1-dia. difference to distinguish between plastic fibers the emission and reception sides. *2. Material: Stainless steel (SUS0) Sleeve head* fiber: 2.2 dia. Two,.2-dia. mounting holes with 6-dia. countersinks *Material: ABS E2-T16P E2-T16PR E2-T16J E2-T16JR E2-T16 Receiver surface (2 11) Emitter Two,.2 dia dia. countersink axis 20 head* 4 surface (2 11) 19 4 Two,.2-dia. holes with 6-dia. countersinks surface 2 (2 11) axis * head* 20 fiber: 2.2 dia Two, 27 6 dia head*1 Lens (2 ) (PMMA) 8.4 axis fiber: 2.2 dia. *1. Material: Heat-resistant ABS *2. Provided with stickers with slits of width 0.5 and 1 mm (2 of each). *Material: ABS for the sensing head and PMMA for the prism. fiber: 2.2 dia. *1. Material: Heat-resistant ABS *2. Provided with stickers with slits of width 0.5 and 1 mm (2 of each). 54

40 Photoelectric Heat-resistant Models Indicates models that allow free cutting. E2-T dia dia. 1 Two hexagonal nuts Two toothed washers head: M4 0.7* fiber: 2.2 dia. *Material: Brass/nickel plating Note: The maximum allowable temperature is 150 C. The maximum allowable temperature for continuous operation is 10 C. E2-T81R-S 0.7 dia. E2-T84S-S 7 (14.2) Two hexagonal nuts Protective tube Two toothed washers M head:.6 dia. 2 dia. M4 0.7 * A (75) dia. A 5 B Fluororesin tube 1 *2 5 E2-T54 2 dia surface head: * fiber: 2.2 dia. *Material: Stainless steel (SUS0) Note: The maximum allowable temperature is 150 C. The maximum allowable temperature for continuous operation is 10 C. 4 dia. B Sleeve 2.2 dia. 1 *2 E2-T61-S 1 dia. *1. Material: Stainless steel (SUS0) Note: The maximum allowable temperatures for sections A and B are 200 C and 1 C, respectively. The section inserted into the Unit (indicated by *2), however, must stay within the Unit's operating temperature range. Two hexagonal nuts Flexible tube: 2.8 dia. (stainless steel) Two toothed washers Hexagonal caulking M head: M4 0.7 *1 4 dia. Sleeve 2.2 dia. 0 max R dia. head *1 Lens (2 dia.) 4 dia. Flexible tube: 2.9 dia. (stainless steel) 4 dia. 2.2 dia. Sleeve Antislip tread *1. Material: Stainless steel (SUS0) Note: The maximum allowable temperatures for sections A and B are 200 C and 1 C, respectively. The section inserted into the Unit (indicated by *2), however, must stay within the Unit's operating temperature range dia. * 5 1 *2 A B *1. Material: Stainless steel (SUS0) *. The diameter is 6 mm if the fiber length exceeds m. Note: The maximum allowable temperatures for sections A and B are 200 C and 1 C, respectively. The section inserted into the Unit (indicated by *2), however, must stay within the Unit's operating temperature range. Chemical-resistant Models E2-T11F Lens:.7 dia. Nut *1 head *1 fiber: 2.2 dia. *2 E2-T12F Lens: 4 dia. head: 5 dia. Fluororesin 4 dia. fiber: 2.2 dia. 7.2 dia. (.7) R (5) *1. Material: PFA *2. Sheath material: Fluororesin 20 0 E2-T14F E2-T51F head: 5 dia. Fluororesin 4 dia. fiber: 2.2 dia. Lens:.7 dia. (20) axis (21) E2-T81F-S 0 head: 5 dia. Fluororesin fiber: 2.2 dia. 6 dia..7 dia. (R6) (0.8) PFA cover 0 Protective tube (70) A PFA tube 2 dia. 5 4 dia. B Sleeve 2.2 dia. 1 *2 Note: The maximum allowable temperatures for sections A and B are 200 C and 1 C, respectively. The section inserted into the Unit (indicated by *2), however, must stay within the Unit's operating temperature range. 55

41 Photoelectric Vacuum-resistant Models E2-T51V M4 0.7* Two nuts 1.15 dia. M Two spring 4 dia. fiber: 4 dia. washers 8 20 (0) 1, dia. Connected to flange (vacuum side) 26 *Material: Aluminum E2-T54V 18 M dia. * R9 4 (15) 1, dia. 4 dia. 4 dia. 2.2 dia. () 26 Connected to flange (vacuum side) *Material: Stainless steel (SUS04) E2-T84SV Lens (2 dia.) E9-F1V head: * (14.2) 12 0 max. 6.5 dia. 12 1,000 R dia. Flexible tube (stainless steel): 2.9 dia. 4 dia. 2.2 dia. 4 dia. 0.5-dia. hole M Effective depth:.8 Spot-facing depth: Connected to flange (vacuum side) *Material: Stainless steel (SUS04) E2-VF4 6 dia. Four, dia dia dia. 45 E2-VF1 22 (96) (6) (2) 0 20 dia (.5) Flange V40 O-ring Flange Note: 1. Perform mounting so that the V15 O-ring is on the atmospheric pressure side of the vacuum chamber wall. 2. Mounting-hole cutout dimensions: 14.5 dia. ±0.2 mm E2-TV 2M 90 dia. Note: 1. Perform mounting so that the V15 O-ring is on the atmospheric-pressure side of the vacuum chamber wall. 2. Mounting-hole cutout dimensions: 14.5 dia. ±0.2 mm E9-F54V One nut M14 2 Two, connectors One spring washer V15 O-ring dia Material: Stainless steel (SUS04)

42 Photoelectric Units with Reflective Standard/Flexible Models Indicates models that allow free cutting. E2-D11N Two, 1-dia. (sensing surface) E2-D211 E2-D211R Two, 0.5 dia. (45) head (brass/nickel plating) M (standard length) Model display tube fiber, 2.2 dia. Two, M6 nuts and washers provided. Two hexagonal nuts Two toothed washers head: M4 0.7* fiber: Two, 1 dia. 2.4 Two Attachments (E9-F9) 15 *Material: Stainless steel (SUS0) E2-DC200 E2-D11R 4.8 E2-DC200E E2-D21R Two hexagonal nuts Two, 1 dia. Two toothed washers fiber: Two, 2.2 dia. 4 dia. head* M Two, 0.5 dia Two hexagonal nuts Two toothed washers head: M 0.5* fiber: Two, 1 dia. 1.8 *Material: ADC Two Attachments (E9-F9) *Material: Stainless steel (SUS04) E2-D12 E2-D12R Two, 1 dia E2-D22 E2-D22R Two, 0.5 dia. 2.7 dia. head: * fiber: Two, 1 dia. head* Heat-shrinkable tube fiber: Two, 2.2 dia. *Material: Stainless steel (SUS04) Two Attachments (E9-F9) 15 *Material: Brass/nickel plating E2-D15X E2-D15XR surface: Two, 1 dia. head* Two, 2.2-dia. mounting holes with 4.4-dia. countersinks on both sides E2-DC200B(B4) E2-DC200BR(B4R) Two hexagonal nuts Two, 1 dia. Stainless-steel tube Two toothed washers (SUS04) head: M dia. max. (fine thread) * fiber: Two, 2.2 dia. *Material: Aluminum fiber: Two, 2.2 dia. (40) *1 *1. ( ): E2-DC200B4 *2. Material: Brass/nickel plating E2-DX E2-DXR head* surface: Two, 0.5 dia Two, 2.2-dia. mounting holes with 4.4-dia. countersinks on both sides E2-DC200F(F4) E2-DC200FR(F4R) Stainlesssteel tube Two, 0.5 dia. 1.2 dia. (SUS04) max (40) * fiber: Two, 1 dia. Two hexagonal nuts Two toothed washers head: M 0.5 *2 fiber: Two, 1 dia. Two Attachments (E9-F9) Two Attachments (E9-F9) *Material: Aluminum *1. ( ): E2-DC200F4 *2. Material: Stainless steel (SUS04) E2-D14L E2-D14LR 5.7 head* 45 Heat-shrinkable tube fiber: Two, 2.2 dia. E2-D24 E2-D24R Stainless-steel tube: 2 dia. head: 45 * Heatshrinkable tube fiber: Two, 1 dia dia. 1 2 Light baffle Light baffle surface Two Attachments (E9-F9) surface *Material: Stainless steel (SUS04) *Material: Stainless steel (SUS04) 57

43 Photoelectric E2-D15Y E2-D15YR surface Two, 2.2-dia. mounting holes with 4.4-dia. countersinks on both sides E2-D15Z E2-D15ZR head* Break-resistant/Coated Models E2-D11 E2-D11U Two, sixteen, dia. fiber: Two, 2.2 dia. head* surface Two, 2.2-dia. mounting holes with 4.4-dia. countersinks on both sides head: M6 0.75* 4 15 Two hexagonal nuts Two toothed washers Protective tube *Material: Aluminum fiber: Two, 2.2 dia. *Material: Aluminum fiber: Two, 2.2 dia. E2-DY E2-DYR 2 surface head* 12 Two, 2.2-dia. mounting fiber: Two, 1 dia. holes with 4.4-dia. countersinks Two Attachments (E9-F9) E2-DZ E2-DZR 2. head* 12 surface Two, 2.2-dia. mounting holes with 4.4-dia. countersinks *Material: Aluminum fiber: Two, 1 dia. Two Attachments (E9-F9) *Material: Aluminum *Material: Brass/nickel plating E2-D21B E2-D21 Two, four, 0. dia. Two hexagonal nuts Two toothed washers head: M4 0.7* fiber: Two, 1 dia. Four, 0. dia. head: M 0.5* Two hexagonal nuts Two toothed washers Protective tube fiber: Two, 1 dia Two Attachments (E9-F9) 15 Material: Stainless steel (SUS0) Two Attachments (E9-F9) 11 *Material: Brass/nickel plating E2-D221B Two, four, 0. dia. 2.7 dia. head: * fiber: Two, 1 dia. E2-D22B Four, 0. dia. head *1 fiber: 1 dia. Brancher (ABS): Two Attachments (E9-F9) 15 *Material: Brass/nickel plating 1.5 dia Attachment *1. Material: Stainless steel (SUS04) Note: The Attachment is attached with adhesive and cannot be removed. E2-D15XB head* surface: Two, sixteen, dia. 15 fiber: Two, 2.2 dia. E2-DXB head* 2 12 fiber: Two, 1 dia. Two, 2.2-dia. mounting holes with 4.4-dia. countersinks on both sides *Material: Aluminum surface: Two, four, 0. dia. Two, 2.2-dia mounting holes with 4.4-dia. countersinks Two Attachments (E9-F9) *Material: Aluminum 58

44 Photoelectric Long-distance/High-power Models Indicates models that allow free cutting. E2-D16 Two, 5.8-dia lenses axis axis head* Two,.2-dia. mounting holes with 6-dia. countersinks fiber: Two, 2.2 dia. *Material: Aluminum E2-D11L Two, 1.4 dia. Two hexagonal nuts Two toothed washers 4 dia. head: M6 0.75* fiber: Two, 2.2 dia *Material: Brass/nickel plating E2-D21L Two, 0.9 dia. Two hexagonal nuts Two toothed washers head: M4 0.7* fiber: Two, 1 dia. E2-D22L Two, 0.9 dia. 2.7 dia. head: * fiber: Two, 1 dia Two Attachments (E9-F9) 15 *Material: Brass/nickel plating Two Attachments (E9-F9) 15 *Material: Brass/nickel plating Ultracompact/Thin-sleeve Models E2-D Stainless-steel tube: 0.8 dia. Two, 0. dia. head: * Heatshrinkable fiber: tube Two, 1 dia. E2-D1 Stainless-steel tube: 0.5 dia. Irraxtube: 1.2 dia. Two, head: 2 dia.* Brancher:.5 dia. 0.1 dia Two Attachments (E9-F9) 5 *Material: Stainless steel (SUS0) 15 Attachment * Material: Stainless steel (SUS0) Note: The Attachment is attached with adhesive and cannot be removed. 59

45 Photoelectric Coaxial/Small-spot Models E2-C11N Sixteen, 0.-dia. reception fibers dia. E2-CC200 E2-CC200R Emission fiber: 1 dia (standard length) Model display tube fiber, 2 dia. (45) 151, dia. (emitting fiber) Sixteen, dia. (receiving fiber) head (brass/nickel plating) M Two, M6 nuts and washers provided. Two hexagonal nuts Two toothed washers head: M6 0.75* fiber: Two, 2.2 dia. dia. Note: There is a white line on the fiber that is inserted in the Emitterside port. E2-C1 Emission fiber: 0.5 dia. Four, 0.-dia. reception fibers head: M 0.5* Two hexagonal nuts Two toothed washers Heat-shrinkable tube *Material: Brass/nickel plating fiber: Two, 1 dia Two Attachments (E9-F9) *Material: Brass/nickel plating Note: 1. There is a white line on the cable fiber that is inserted in the Emitter-side port. 2. The core diameter of the sensing head is assumed to lie in the range 2.44 to 2.49 mm. E2-C dia. (emission fiber) dia. (reception fibers) head: M 0.5* Two toothed washers Two hexagonal nuts Irraxtube: 2.6 dia. Brancher fiber: (ABS resin): Two, 1.2 dia..5 dia. White markings: Emission side heatshrinkable tube) Attachment (5) 17 (0) 22 1,000 *Material: Stainless steel (SUS0) Note: The Attachment is attached with adhesive and cannot be removed. E2-C1N Four, 0.-dia. (receiving fiber) 0.5 dia. (emitting fiber) E2-D2L dia. 5 Emission fiber: 1 dia. Sixteen, dia. reception fibers (45) (standard length) fiber, two, 1-dia..6 dia. Model display tube head (brass/nickel plating) M 0.5 head: * dia. Note: The emitting fiber is indicated by a white line. Two, M nuts and washers provided ,570 Brancher (heat-resistant, ABS, black): 6 dia. fiber: Two 2.2 dia. *Material: Stainless steel (SUS04) Note: There is a yellow dotted line on the fiber that is inserted in the Emitter-side port. E2-D2 Emission fiber: 0.5 dia. Four, 0.-dia. reception fibers head: 2 dia.* Heatshrinkable tube fiber: Two, 1 dia Two Attachments (E9-F9) 22 *Material: Stainless steel (SUS0) Note: There is a white line on the cable fiber that is inserted in the Emitter-side port. E2-C dia. (emission fiber) Two Attachments Brancher White markings: Emission side head: 2 dia.* (ABS resin) (heat-shrinkable tube) Irraxtube: 2.6 dia. fiber: Two, 1.2 dia dia (reception fibers) (5) 2 (0) 22 1,000 *Material: Stainless steel (SUS0) Note: The Attachment is attached with adhesive and cannot be removed. 60

46 Photoelectric Area-sensing Models E2-D6P fiber: Two, 2.2 dia. 5 2 Two,.2-dia. mounting holes.85 head* Retro-reflective Units Lens (PMMA) head* 5 dia dia. (emission and reception fibers in alternating arrangement) *Material: Brass/nickel plating E2-R21 (An E9-R Reflector is provided as an accessory.) Two hexagonal nuts Two washers Silicon tube M fiber: Two, 1 dia. Two Attachments E2-R16 (An E9-R1 Reflector is provided as an accessory.) 7.2 (6) head * *Material: ABS Lens (PMMA) 8 fiber: Two, 2.2 dia. Standard length: 2 m Two, M set screws (provided) *1. Material: ABS Convergent-reflective Models E2-L24S Two,.2-dia. mounting holes with 6-dia. countersinks on both sides E2-L24L 20. E2-L axis head* fiber: Two, 1 dia..6 dia. distance 4.6 Two,.2-dia. lenses Side-view prism (PC) 20 axis head* Two,.2-dia. mounting holes with 6-dia. countersinks on both sides Two Attachments (E9-F9) fiber: Two, 1 dia. 2.2 dia. *Material: ABS Two Attachments (E9-F9) *Material: Polycarbonate 4 distance fiber: Two, 2.2 dia. E2-L16-N axis E2-LL 16 4 E2-LA Model display tube to.4 dia., mounting hole with 6-dia. countersinks on one side.2 dia., mounting hole with 6-dia. countersinks on one side Two,.2-dia. lenses head* 18 Two,.2-dia. mounting holes with 6-dia. countersinks on both sides distance fiber: Two, 2.2 dia. *Material: PVC fiber: Two, 1 dia. fiber: Two, 2.2 dia. Two Attachments (E9-F9) *Material: Polycarbonate distance head* Two,.2-dia. holes with 6-dia. countersinks *Material: Heat-resistant ABS Note: There is a white line on the fiber that is inserted in the Emitterside port. head* Two,.2-dia. holes with 6-dia. countersinks Note: There is a white line on the fiber that is inserted in the Emitter-side port. fiber: Two, 2.2 dia. *Material: Heat-resistant ABS 61

47 Photoelectric Indicates models that allow free cutting. E2-L86 axis Two, 4 dia A 5 (max.) B 4 dia. Two,.2-dia. holes with 6-dia. countersinks on one side 1 Note: The maximum allowable temperatures for sections A and B are 200 C and 1 C, respectively. The section inserted into the Unit (indicated by *2), however, must stay within the Unit's operating temperature range. E2-L64 E2-A Two, 4 dia optical axis Two,.4-dia., mounting.7 11 holes with 6. countersinks on one side head (stainless steel) A 2000 (standard length) Label head (stainless steel) Flexible tube: 2.8 dia.* *Material: Stainless steel B dia. Flexible tube: 2.9 dia. (stainless steel) 45 (standard length) 2.2 dia. Model display tube,. Mounting holes Two, M 6.5±0.1 Note: 1. The maximum allowable temperatures for sections A and B (The section inserted into the Unit) are 00 C and 1 C respectively. 2. Please remove the label when using the Unit Two,.2 dia. mounting hole with 6.2-dia. countersinks on one side 6 head (ABS) fiber: Two, 2.2 dia. Mounting hole 7±0.1 Two, M Heat-resistant Models E2-D51 Two, 1.5 dia. 4.9 Two hexagonal nuts Two toothed washers fiber: Two, 2.2 dia. head: M6 0.75* *Material: Brass/nickel plating Note: The maximum allowable temperature is 150 C. The maximum allowable temperature for continuous operation is 10 C. E2-D81R-S E2-D81R E2-D61-S E2-D61 Using the E2-D81R-S Two toothed washers (SUS) Two hexagonal nuts (SUS) : 1.2 dia. head: M *1 Protective tube SUS flexible tube M4 0.7 (gray) 5 dia. 2.2 dia. (4.2 dia.) Sleeve SUS0 2.2 dia. Sleeve *2 5 (70) B *2 6.4 A B *1. Material: Stainless steel (SUS0) Two hexagonal nuts Using the E2-D61-S Using the E2-D61 Two toothed washers head: SUS flexible tube SUS16L 1.4 dia. M4 0.7 M *1 Hexagonal caulking 5 dia. 2.2 dia. 5 dia. *2.5 dia. Sleeve 5 dia. Sleeve * A 5 15 B dia. Using the E2-D81R B *1. Material: Stainless steel (SUS0) *2. The diameter is 6 if the fiber length exceeds m. *. The diameter is if the fiber length exceeds m Note: The maximum allowable temperatures for sections A and B are 200 C and 1 C, respectively. The section inserted into the Unit (indicated by *2), however, must stay within the Unit's operating temperature range. Note: The maximum allowable temperatures for sections A and B are 50 C and 1 C, respectively. The section inserted into the Unit (indicated by *2), however, must stay within the Unit's operating temperature range. 62

48 Photoelectric E2-D7-S E2-D7 7 Two hexagonal nuts Two toothed washers Stainless-steel tube: head: 1. dia. SUS flexible tube 1 dia. M4 0.7 * dia. dia. 4 dia. 2.8 dia. 5 dia. 2.2 dia. Sleeve Chemical-resistant Models 5 Using the E2-D7-S Hexagonal caulking SUS16L Sleeve 5 dia Using the E2-D * *2 A B C C 6.4 *1. Material: Stainless steel (SUS0) Note: The maximum allowable temperatures for sections A, B, and C are 400 C, 00 C, and 1 C, respectively. The section inserted into the Unit (indicated by *2), however, must stay within the Unit's operating temperature range. E2-D12F E2-D14F 0 head: 6 dia. Fluororesin 5 dia. fiber: Two, 2.2 dia. 4.5 (26) 8 15 Fluororesin tube (protective cover) 16 0 axis head: 7 dia. -axis mark fiber: 2.2 dia. -specific Units Label-detection Models E2-G head* R1.6 R1.6 Lens (PMMA) R.5 24 axis.2 9 Liquid-level Detection Models E2-D6T 2.45 R 11.4 (0) fiber: Two, 2.2 dia head 1. Eight, R0.5 fiber: Two, 2.2 dia. Emission side: Sixteen, dia. *Material: ABS Thirty-two, dia.* Reception side: Sixteen, dia. E2-LT (1) 15.2 Two,.2-dia. lenses (PC) Two Attachments (E9-F9) fiber: Two, 1 dia. 4 6 Mounting hole head (PC)

49 Photoelectric E2-A01 head* E2-A02 head* Tube holder surface axis (2 11) 27 Receiver ,000 *Material: ABS for the sensing head, PMMA for the prism, and PBT for the pipe holder Tube holder surface (2 11) axis ,000 *Material: ABS for the sensing head, PMMA for the prism, and PBT for the pipe holder. E2-D82F1 E2-D82F2 Emitter connector (brass/nickel plating): 9 dia. head (Fluororesin): 6 dia. 8 dia. fiber: Two, 2.2 dia. *2 To the Unit 7.2 Length of unbendable 27 section: 150 (50) *1 42 *1. ( ): E2-D82F2 *2. The 2-m section of optical fiber on the -unit side is plastic and therefore allows free cutting. Glass-substrate Alignment/Mapping Models Indicates models that allow free cutting. E2-A08 E2-A07E1/-A07E Reception fiber: 2.2 dia. E2-L A 5 B 1 * axis Two,.24-dia. mounting holes with four, 6-dia. countrsinks Emission fiber: 2.2 dia Two,.2-dia. mounting holes with 6-dia. countersinks head *1 4 dia. 2.2 dia. *1. Material: Stainless steel (SUS0) 6 Two, 2.8-dia. flexible tubes (stainless steel) Note: The maximum allowable temperatures for sections A and B are 00 C and 1 C, respectively. The section inserted into the Unit (indicated by *2), however, must stay within the Unit's operating temperature range. E2-A09 E2-A09H 9 axis 2 E2-A09H2 axis A Two,.24-dia. mounting holes with 6-dia. countersinks 5 B 28 1 *2 Lens: 5.8 dia head* 12 7 fiber: Two, 2.2 dia. Two,.2-dia. mounting holes with 6-dia. countersinks *Material: Aluminum Lens: 5.8 dia head *1 2.8-dia. flexible tubes* 5 dia. 4 dia. 2.2 dia. *1. Material: Stainless steel Note: The maximum allowable temperatures for sections A and B are 00 C and 1 C, respectively. The section inserted into the Unit (indicated by *2), however, must stay within the Unit's operating temperature range. 64

50 Photoelectric E2-A08H2 Two,.4-dia. mounting hole with 6.-dia. countersinks on one side 18 5 A B 26,000 (Standard length) 0 12 Label dia dia. 1 axis head (stainless steel) Flexible tube: 2.9 dia. (stainless steel) Sleeve (aluminum) Note: 1. The maximum allowable temperatures for sections A and B (The section inserted into the Unit) are 00 C and 1 C respectively. 2. Please remove the label when using the Unit. Two, M 2.2 dia. 6.5±0.1 Mounting hole Glass-detection Models Indicates models that allow free cutting. E2-L11FP (7) Glass Fluororesin (PFA) Heat-resistant PVC E2-L11FS E2-L12FS 17.5 (11) Glass 12 5 Fluororesin (PFA) SUS16L Fluororesin (PFA) Mounting hole A Two, 4.2-dia. mounting holes Fluororesin (PFA) Mounting hole A Two, 4.2-dia. mounting holes 4-dia. fluororesin tube (t=0.5)(ptfe) Standard length: 2 m 4-dia. fluororesin tube (t=0.5)(ptfe) Standard length: 2 m fiber: 2.2 dia. fiber: 2.2 dia. 65

51 Photoelectric Wafer-mapping Models E2-A Two, R dia. R surface.2 Stamp (1-mm dia.) head *1 E9-L8 Mounting Bracket (SUS) Attachment (E9-F9) Note: Use the stamped surface and its opposing surface as installation (reference) surfaces. E2-A Four, R1.5 2 dia. 4 2 dia dia fiber: 1 dia. surface head * Stamp (1-mm dia.) Note: Use the stamped surface and its opposing surface as installation (reference) surfaces. *Material: Brass/nickel plating Attachment (E9-F9) *Material: Stainless steel (SUS0) E2-A surface 2 dia. fiber: 1 dia. Stamp (1-mm dia.) Two,.4 dia. Attachment (E9-F9) head * Note: Use the stamped surface and its opposing surface as installation (reference) surfaces. E2-A Installation (reference) surface 2 2 dia axis surface head * *Material: Brass/nickel plating fiber: 1 dia. Two, M2 17 Attachment (E9-F9) 1.2 dia. *Material: Stainless steel (SUS0) 66

52 Photoelectric Accessories Lens Units Lens Units E9-F1 Material: Brass for the body and optical glass for the lens itself. Note: Two per set. 4 dia. 8.9 M Effective depth:.8 Spot-facing depth: 0.9 Side-view Units E9-F2 Material: 4 dia. Brass for the body and optical glass for the lens itself. Note: Two per set. 2.8 dia M2.6 Effective depth:.2 Spot-facing depth: 0.9 Reflection Unit with Lens E9-F Two, 4 dia. M internally toothed washer Two,.2 dia. Two, M slotted-head set screws* ± Material: Brass for the body and aluminum for the base. M 6 angle-setting screw * Secure the fiber head with the slotted-head set screws. Do not insert a lens (E9-F1). Lens Unit for Reflective Units E9-FA 6 dia. 4 dia. M2 2 Allen-head set screw (for securing the fiber) Lens surface Material: (lens diameter:.7 mm) 1 Aluminum for body and optical glass for lens. 2 Note: This is the Lens Unit for the E2-D2 and E2-C42. Lens Unit for Reflective Units E9-FB 2.1 dia. Lens Unit for Reflective Units E9-FA-5 4 dia Lens surface (lens diameter:.7 mm) Material: Aluminum for body and optical glass for lens. Straight knurling 5 dia. Note: This is the Lens Unit for the E2-C1 and E2-C41. Lens Unit for Reflective Units E9-FC Straight knurling 2.1 dia. M 0.5 Effective screw length: 6 dia. 5.5 dia dia Lens surface.2 (lens diameter: 4.8 mm) M 0.5 Depth: Lens surface.9 (lens diameter:.7 mm) M 0.5 Effective screw length: Material: Aluminum for body and optical glass for lens. Material: Aluminum for body and optical glass for lens. Note: This is the Lens Unit for the E2-C1 and E2-C41. Note: This is the Lens Unit for the E2-C1 and E2-C41. 67

Photoelectric Protective Spiral Tubes E9-F2A/F2A5 E9-F2B/F2B5 M 0.5; depth: 4 6 dia. Head connector *1 (4.6 dia.) End cap *1 12 Tube *2 12 *1. Material: Brass/nickel plating L *2.

53 Photoelectric Protective Spiral Tubes E9-F2A/F2A5 E9-F2B/F2B5 M 0.5; depth: 4 6 dia. Head connector *1 (4.6 dia.) End cap *1 12 Tube *2 12 *1. Material: Brass/nickel plating L *2. Material: Stainless steel (SUS04) Note: 1. The length L is 1,000 for the E9-F2A/-F2B and 500 for the E9-F2A5/-F2B5. 2. The E9-F2B(5) consists of two E9-F2A(5)s. E9-F2C/F2C5 M4 0.7; depth: 4 Head connector *1 (5.6 dia.) End cap *1 4 dia. 7 dia. 12 Tube *2 12 L Note: The length L is 1,000 for the E9-F2C and 500 for the E9-F2C5. *1. Material: Brass/nickel plating *2. Material: Stainless steel (SUS04) E9-F2D/F2D5 M6 0.75; depth: 4 Head connector *1 (7 dia.) End cap *1 5 dia. 8.5 dia. 12 Tube *2 L 12 *1. Material: Brass/nickel plating *2. Material: Stainless steel (SUS04) Note: The length L is 1,000 for the E9-F2D and 500 for the E9-F2D5. Accessories Cutter E9-F Thin-fiber Attachments E9-F9 1.1 dia. Mark indicating position of insertion into Unit 24.5 (2.2 dia.) Material: ABS dia. Connector E9-F Standard-fiber insertion hole Thin-fiber insertion hole Retention : 2.2 dia. clip *2 Splice *1 Note: Two per set. Provided with thin-fiber models..8 dia. Retention clip *2 : 2.2 dia *1. Material: Polyester *2. Material: Brass Connector E9-F1 E9-F14 E9-F15 Sleeve Bender E9-F11.8 Four, 6 dia. R1 R7.5 4 (48.6) Four, A (See note.) Four, 0.8 R5 R Four, R Mounting Bracket E9-L Note: Dimension A varies with the model number as shown in the following table. Dimension Model A E9-F1 2.4 E9-F E9-F15 2.4/1.2 Six, R Two, R R

1,100 (2,600) *1 M4 screw

1,100 (2,600) *1 M4 screw # / 9 / ± µ D DD Ω H H I µ 99 Ω I : High-resolution mode : Standard mode : Super-high-speed mode ; 1,0 (2,600) *1 M4 screw 870 (2,000) 350 (840) 1,0 870 3-mm dia. 350 340 M3 screw 260 0 2-mm dia. 0 340